Thermo Mechanical Modeling of Piezoresistive Pressure Sensor

Beddiaf, Abdelaziz; Kerrour, Fouad; Kemouche, Salah

doi:10.15866/iremos.v7i3.1070

Cited by 4 publications

(3 citation statements)

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“…To highlight the effect of the thickness of the diaphragm, we have shown in Figure 6 the temperature variation according to the applied voltage for different values of the thickness d. The T(V 0 ) goes on decreasing as the membrane thickness is increased. However, according to previous studies [11], [12] this leads to weakening the pressure sensitivity of the sensors. Figure 6.…”

Section: Membrane Thickness Effect Dmentioning

confidence: 95%

“…We will study the thermal drift caused by Joule heating of piezoresistive pressure sensor characteristics, so the geometric influence parameters on these characteristics to optimize the sensor performance. The choice of these geometrical parameters for simulations is taken from earlier papers [11], [16].…”

Section: Geometric Effect Parameters In the Generation Of Temperaturementioning

confidence: 99%

“…The same authors have developed a simple and accurate conduction-convection model to predict the temperature distribution in p-doped piezoresistive microcantilevers because of self-heating [10]. Recently, we made a thermomechanical modeling of a piezoresistive pressure sensor [11]. More recently, in another study, we modeled the thermal behavior of the capacitive pressure sensors, using Finite Element Analysis (FEA) established in COMSOL.…”

Section: Introductionmentioning

confidence: 99%

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A Numerical Model of Joule Heating in Piezoresistive Pressure Sensors

Beddiaf¹,

Kerrour

Kemouche

2016

IJECE

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Thermal drift caused by Joule heating in piezoresistive pressure sensors affects greatly the results in the shift of the offset voltage of the such sensors. The study of the thermal behavior of these sensors is essential to define the parameters that cause the output characteristic drift. The impact of Joule heating in a pressure sensor has been studied. The study involves the solution of heat transfer equation considering the conduction in Cartesian coordinates for the transient regime using Finite Difference Method. We determine how the temperature affects the sensor during the applying a supply voltage. For this, the temperature rise generated by Joule heating in piezoresistors has been calculated for different geometrical parameters of the sensor as well as for different operating time. It is observed that Joule heating leads to important rise temperature in the piezoresistor and, hence, causes drift in the output voltage variations in a sensor during its operated in a prolonged time. This paper put emphasis on the geometric influence parameters on these characteristics to optimize the sensor performance. The optimization of geometric parameters of sensor allows us to reducing the internal heating effect. Results showed also that low bias voltage should be applied for reducing Joule heating.

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Section: Membrane Thickness Effect Dmentioning

confidence: 95%

Section: Geometric Effect Parameters In the Generation Of Temperaturementioning

confidence: 99%