Thermo-mechanical reliability optimization of MEMS-based quartz resonator using validated finite element model

Design optimization of RF-MEMS switch considering thermally induced residual stress and process uncertainties

“…Maute et al [22] have used topology optimization for MEMS considering the stochastic loading and material properties. To improve the thermal reliability of the MEMS based quartz resonator, a design optimization is carried out using the FEM modeling in [23]. These optimization methods have proved to be efficient to a certain extent, but their inconvenience for the complex multiphysics MEMS devices and high computational costs raises the need for the alternative optimization methodologies.…”

The Failure of the Novel Solid MEMS Switch in Multi-Physical Coupling Field

“…3 below, which consists of 89934 tetrahedral grid elements. In order to save computation time, certain aspects of the structure such as complex geometry and thin layers can be simplified or assumed negligible, which will not significantly affecting the results [4].…”