Thermo-Structural Coupled Topology Optimization of Micro-Capacitive Accelerometer

Abstract

In order to enhance the working performance of micro-capacitive accelerometer in high temperature environment, the structure topology optimization of a micro-capacitive accelerometer is proposed. After the study of thermo-structural coupled governing equations and sensitivity analysis, the mass-block and elastic-beam structure of comb micro-capacitive accelerometer topology optimization model is established. Then the optimal topology forms of mass-block and elastic-beam structure are obtained with the MMA (method of moving asymptotes) method. At last, the calculating results indicate that the maximum deformation at acceleration detection direction is only 22nm at the operating temperature range of 0~300°C, which less than the maximum deformation of the limit value (25nm), and provides a reliable way for innovative design of micro-capacitive accelerometer.