Thermoelastic coupling effect on a micro-machined beam resonator

Guo, Fenglin; Rogerson, G. A.

doi:10.1016/s0093-6413(03)00061-2

Cited by 79 publications

(30 citation statements)

References 4 publications

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“…The mechanical coupling represents an internal damping mechanism of the mechanical system, wherein the beam motion leads to a heat generation. As outlined by Guo and Rogerson [17], this thermal damping is of a similar order than that of the viscous damping in air and is the dominant damping mechanism in vacuum operation. An internal heat is generated by two volumetric sources, the power supply of the sensor g s j t and the power from the excitation signal g a j i t , given by…”

Section: B Thermal System and Actuationmentioning

confidence: 91%

“…Bold symbols represent a vector or matrix, where the vectors Φ w/θ and q w/θ are column vectors containing the summands from (17) and (29) from n = 1 until N. The comparison functions are based on the undamped and homogeneous equations (9) and (12), with F TS = 0 (see Appendix A). To discretize the equations of motion, approach (17) and (29) are introduced to (9) and (12) and a Galerkin method is applied, with multiplying mechanical and thermal equation with Φ w and Φ θ , respectively, and integrate both equations with respect to the x direction. Accordingly, the equations of motion of the coupled system can be written to…”

Section: Coupled Systemmentioning

confidence: 99%

“…Li et al [16], in contrast, approach the coupled electro-thermo-mechanical problem by means of a nodal analysis, utilizing circuit simulation software to achieve a less computational expensive model. Approaches in view of a dynamical analysis of coupled thermo-mechanical fields focus on the effects of thermal damping in microbeams [17]- [19]. As outlined in these articles, the thermo-elastic damping has a significant influence on the dynamical behavior and depends on the geometrical dimensions of the resonator [17], [18].…”

mentioning

confidence: 99%

“…Approaches in view of a dynamical analysis of coupled thermo-mechanical fields focus on the effects of thermal damping in microbeams [17]- [19]. As outlined in these articles, the thermo-elastic damping has a significant influence on the dynamical behavior and depends on the geometrical dimensions of the resonator [17], [18]. They also exhibit an influence in view of a shift in resonant frequency, outnumbering the influence of air damping of the order of 10 −3 [17].…”

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confidence: 99%

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Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Roeser

Gutschmidt

Sattel

et al. 2016

J. Microelectromech. Syst.

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Abstract-An array of microbeams is a promising approach to increase the throughput of scanning probe microscopes and lithography. This concept requires integrated sensors and actuators which enable individual measurement and control. Thus, existing models for single beams need to be reassessed in view of its applicability for arrays, which involve additional physical interactions and a varying geometry along the beam's length. This paper considers a single composite microbeam, which is excited by a thermal actuator and its displacement is measured by a piezoresistive sensor. We derive a model that incorporates the beam's composite structure, varying geometry along its length, its thermal coupling for actuation, and thermoelastic damping. Subsequently, the influence of the beam's geometry on its eigenmodes and frequencies is analyzed in far and close proximity operation to a surface. We observe parametric excitation phenomena of multiple integers of the fundamental excitation frequency, which originates from the geometrical composition of the beam. Furthermore, we observe that the so far constant assumed factor to convert the sensor signal to the beam's displacement depends on the dissipated power within the actuator, as well as on the dynamic behavior of the system, and thus is not constant.[2015-0208]

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Section: B Thermal System and Actuationmentioning

confidence: 91%

Section: Coupled Systemmentioning

confidence: 99%

mentioning

confidence: 99%

mentioning

confidence: 99%

See 2 more Smart Citations

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Roeser

Gutschmidt

Sattel

et al. 2016

J. Microelectromech. Syst.

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show abstract

“…Up to date, a little of work relative to the size effect of thermoelastic damping upon vibration frequency response for the micro-resonators has been reported. Guo and Rogerson [43] studied the thermoelastic coupling in a doubly clamped elastic prism beam and examined its size-dependence. Lifshitz and Roukes [12] studied thermoelastic damping of a beam with rectangular cross sections, and found that after the Debye peaks, the thermoelastic attenuation will be weakened as the size increases.…”

Section: Theoretical Study Of Thermoelastic Dampingmentioning

confidence: 99%

Advances in Thermoelastic Damping in Micro- and Nano- Mechanical Resonators: a Review

Fang

Sun

Soh

2007

JMMP

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In this article, the recent and original results on the effect of thermoelastic damping (TED) on the vibrational properties of micro-and nano-mechanical resonators are reviewed. Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro-scale resonators. The thermoelastic damping theory was first presented by Zener in 1937, and recently refined by Lifshitz and Roukes. A review of the thermoelastic damping process is presented. Also the theoretical and experimental advances in this field are introduced and discussed. Finally, some results gained by the authors are presented.

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Thermally stressed thermoelectric microbeam supported by Winkler foundation via the modified Moore–Gibson–Thompson thermoelasticity theory

2023

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This article offers the first investigation into the thermoelectric vibration of microscale Euler‐Bernoulli beams resting on an elastic Winkler base. We developed the system of equations for thermoelastic microbeams using elastic basis theory and the generalized Moore–Gibson–Thompson (MGT) thermal transport framework with a single‐phase delay. At the front of the microbeam, a graphene strip connected to an electrical power source was employed to generate heat. In addition, the influence of an ultra‐short‐pulsed laser on the vibration of a microbeam is studied, taking into account its heating effect. The microbeam system variables were analyzed after solving the mathematical equations by applying the Laplace transform technique. Graphs showing how different inputs affect different mechanical fields, such as Winkler substrate stiffness, voltage, electrical resistance, and temperature modulus pulses, are also presented. An increase in the Winkler modulus and the shear modulus of the foundation was found to decrease the amount of deflection and axial deformation in the microbeams. The increased beam stiffness has resulted in this decrease.

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Thermoelastic coupling effect on a micro-machined beam resonator

Cited by 79 publications

References 4 publications

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Tip Motion—Sensor Signal Relation for a Composite SPM/SPL Cantilever

Advances in Thermoelastic Damping in Micro- and Nano- Mechanical Resonators: a Review

Thermally stressed thermoelectric microbeam supported by Winkler foundation via the modified Moore–Gibson–Thompson thermoelasticity theory

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