Seventeenth International Conference on Thermoelectrics. Proceedings ICT98 (Cat. No.98TH8365)
DOI: 10.1109/ict.1998.740367
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Thermoelectric properties of SiC thin films

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Cited by 2 publications
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“…18) This indicates that Series-A-0 has a very short interval amorphous layered structure. That is, as-deposited films have a layered structure, [7][8][9][10][11][12][13][14] although electrons can pass through barrier layers by tunneling because of the films' very short artificial interval. Therefore, the PA spectrum is not affected by ''multi-quantum well (MQW)'' directly.…”
Section: Resultsmentioning
confidence: 99%
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“…18) This indicates that Series-A-0 has a very short interval amorphous layered structure. That is, as-deposited films have a layered structure, [7][8][9][10][11][12][13][14] although electrons can pass through barrier layers by tunneling because of the films' very short artificial interval. Therefore, the PA spectrum is not affected by ''multi-quantum well (MQW)'' directly.…”
Section: Resultsmentioning
confidence: 99%
“…The sample preparation procedures are almost the same as those reported previously. [7][8][9][10][11][12][13][14] Au (High Purity Chemicals; 99.9% up) doped Ge (Furuuchi Chemicals; 99.99% up) and Si (High Purity Chemicals; 99.999%) superlattice thin films were prepared by an independent shutter operation with the simultaneous evaporation of these two components onto glass substrates in an ultrahigh vacuum system. The base pressure of the stainless steel chamber with a liquid N 2 shroud was approximately $10 À8 Pa, but increased up to $10 À6 Pa during the operation of two electron beam guns.…”
Section: Methodsmentioning
confidence: 99%
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“…7,8) The maximum power factor of such films reaches approximately 7 W/mK 2 at around 800 K. The large thermoelectric power of the samples is not from the superlattice structure but from mixtures of Si/Ge amorphous phases and/or microcrystals. [7][8][9][10][11] In general, superlattice structures have mainly two effects. One is the multi quantum well effect and the other is the strain effect.…”
Section: Introductionmentioning
confidence: 99%