Thermooptically Tuned Photonic Crystal Waveguide Silicon-on-Insulator Mach–Zehnder Interferometers

Modulation speed improvement in a Fabry–Perot thermo-optical modulator through a driving signal optimization technique

“…As noted above, this response is not dependent on the device length. In the same plot, the transient response to the same current pulse, calculated by means of two-dimensional thermal numerical simulations 6 is also shown, demonstrating that the simplified analytical model provides reliable results. As can be seen, the cooldown transient can be considered in practice extinguished within a few w 's.…”

Ultra-compact variable optical attenuator based on slow light photonic crystal waveguide

“…Vlasov et al experimentally demonstrated a doped silicon PCWG optical modulator with a MZI structure and an electric controlled heater [8] . Gu et al [9,10] demonstrated PCWG modulators with metal microheaters applied to either arm of the MZI. However, the main drawback of the MZI structure is its large device size, which hampers the realization of the π phase-shift.…”

“…SiO 2 cladding layer with a thickness of 1 µm was deposited on the surface by plasma-enhanced chemical vapor deposition. This dioxide layer forms a vertical symmetric structure to improve the coupling efficiency between fiber and access waveguide and performs as an isolated layer to prevent the absorption loss of the microheater [9] . On top of the SiO 2 cladding layer, the Al strip microheater (width: 4.7 µm, thickness: 250 nm, length: 20 µm) was deposited by metal evaporation and one-step lift-off after ultraviolet (UV) lithography.…”

Thermo-optic switch based on transmission-dip shifting in a double-slot photonic crystal waveguide

“…[10][11][12][13] There are two operating mechanisms reported for the PCWG based optical switches. One is applying PCWGs on the conventional Mach-Zehnder interferometers (MZIs) 5,6 or directional couplers, 3 where PCWGs are used to realize p phase-shift with a small size, a low operating power. The other one is based on the cutoff effect in a single PCWG.…”

“…On the top of the DS-PCWG, 1 lm thick SiO 2 overcladding layer was deposited to obtain both optical and electrical isolations. 3,6 The cladding layer is also helpful to obtain vertical symmetric waveguide structure so that the end-fire coupling efficiency between the fiber and the access waveguide could be improved. Then, the microheater was fabricated as a rightangle bent Ti strip with width of 3 lm and thickness of 100 nm to obtain high heating efficiency and uniform temperature distribution.…”