Thermophoretic deposition of palladium aerosol nanoparticles for electroless micropatterning of copper

Byeon, Jeong Hoon; Yoon, Ki Hyun; Jung, Yee Kyeong; Hwang, Jungho

doi:10.1016/j.elecom.2008.06.025

Cited by 15 publications

(12 citation statements)

References 18 publications

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“…When the potential difference between the isolated anode and cathode (two iron rods) was high enough, the accumulated charges were discharged through electrical breakdown in the form of a spark, vaporizing the electrodes and nucleating primary particles of a few nanometers in diameter (before agglomeration). These nanoparticles were carried by a flow of nitrogen gas and grew in size up to tens of nanometers to 100 nm by coalescence depending on the kind of metals [ 12 , 13 ]. Then, the aerosol nanoparticles were deposited on a silicon dioxide (SiO 2 ) substrate through the patterned holes in the shadow mask because of the thermophoresis effect, in which the particles move from a high-temperature to a low-temperature area along the temperature gradient between the room-temperature aerosol nanoparticles and the bottom of the SiO 2 substrate cooled to near 0°C by the Peltier cooler.…”

Section: Methodsmentioning

confidence: 99%

“…Then, the aerosol nanoparticles were deposited on a silicon dioxide (SiO 2 ) substrate through the patterned holes in the shadow mask because of the thermophoresis effect, in which the particles move from a high-temperature to a low-temperature area along the temperature gradient between the room-temperature aerosol nanoparticles and the bottom of the SiO 2 substrate cooled to near 0°C by the Peltier cooler. It is known that during this thermophoretic process, smaller nanoparticles are more easily affected and moved by the temperature gradient [ 12 , 13 ], and thus, the majority of the nanoparticles on the patterns would be less than 100 nm in diameter. Then, the nanoparticles generated from the spark discharge were used as seed catalytic nanoparticles for CNT synthesis.…”

Section: Methodsmentioning

confidence: 99%

“…In this study, we used the spark discharge method to generate catalytic aerosol nanoparticles for CNT synthesis and patterned the particle-deposited area using a shadow mask and the thermophoresis effect [ 12 , 13 ]. With the patterned nanoparticles, site-specific growth of CNTs was demonstrated.…”

Section: Introductionmentioning

confidence: 99%

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Site-specific growth and density control of carbon nanotubes by direct deposition of catalytic nanoparticles generated by spark discharge

Park

Hwang

et al. 2013

Nanoscale Res Lett

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Catalytic iron nanoparticles generated by spark discharge were used to site-selectively grow carbon nanotubes (CNTs) and control their density. The generated aerosol nanoparticles were deposited on a cooled substrate by thermophoresis. The shadow mask on top of the cooled substrate enabled patterning of the catalytic nanoparticles and, thereby, patterning of CNTs synthesized by chemical vapor deposition. The density of CNTs could be controlled by varying the catalytic nanoparticle deposition time. It was also demonstrated that the density could be adjusted by changing the gap between the shadow mask and the substrate, taking advantage of the blurring effect of the deposited nanoparticles, for an identical deposition time. As all the processing steps for the patterned growth and density control of CNTs can be performed under dry conditions, we also demonstrated the integration of CNTs on fully processed, movable silicon microelectromechanical system (MEMS) structures.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

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Site-specific growth and density control of carbon nanotubes by direct deposition of catalytic nanoparticles generated by spark discharge

Park

Hwang

et al. 2013

Nanoscale Res Lett

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“…The catalytic surface activation involved the spark generation [30] of aerosol palladium nanoparticles and their fibrous filtration by rayon-based ACF (38 mm in diameter and 2.6 mm in thickness, KF-1600, Toyobo). A spark was generated between two identical palladium rods (diameter: 3 mm, length: 100 mm, Nilaco, Japan) inside a reactor under a pure nitrogen environment at STP [31][32][33]. The flow rate of the nitrogen gas, which was controlled by a mass flow controller, was set to 3 L min −1 .…”

Section: Introductionmentioning

confidence: 99%

Aerosol palladium activation for electroless copper deposition and heat treatment with NO injection to fabricate Cu oxide/carbon fibre

Byeon

Lee

Hwang

2009

J. Phys. D: Appl. Phys.

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This paper introduces a novel method for fabricating copper (Cu) oxide/activated carbon fibre (ACF) through the aerosol palladium (Pd) activation for use in electroless Cu deposition and heat treatment of Cu deposited ACF with nitric monoxide (NO) gas injection. Electroless Cu deposition was initiated by catalytically activating the ACF surface with spark generated Pd aerosol nanoparticles. The catalytically activated ACF was placed into a solution used for the electroless Cu deposition. Subjecting the Cu deposited ACF to a heat treatment in a NO/nitrogen (N 2) gas injection (1000 ppm NO) resulted in changes to the morphology of the Cu particles. As the temperature increased from 100 to 500 • C, the relative mass fraction of oxygen in the Cu particles increased from 3.6% to 14.2% and the fraction of Cu decreased from 41.2% to 34.1%, which was caused by the formation of Cu oxides (Cu 2 O and CuO). The corresponding surface area and pore volume of the ACF decreased from 1019 m 2 g −1 to 401 m 2 g −1 and from 0.40 cm 3 g −1 to 0.18 cm 3 g −1 , respectively. The morphological evolution and decrease in porosity were attributed to volume expansion of Cu particles during oxidation.

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“…The stannous ions Sn 2+ or palladium ions Pd 2+ are chemisorbed on the substrate surface forming seeds that induce nucleation of the metallic deposit. Then the activated surface catalyses the electroless deposition initiated from the nuclei formed [4][5][6][7][8][9][10] .…”

Section: Introductionmentioning

confidence: 99%

Electroless deposition of Ni-P on a silicon surface

et al. 2017

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The present article concerns the metallization of silicon substrates by deposition of the nickelphosphorus alloy produced by an autocatalytic chemical process. The deposition electrolyte is composed of a metal salt, a reducing agent (sodium hypophosphite), a complexing agent (sodium citrate) and a buffer (ammonium acetate). The deposition could only be carried out after activation of the silicon by fixing catalytic species on its surface. The immersion of the silicon samples in palladium chloride made it possible to produce relatively thick and regular Ni-P coatings. The immersion time was optimized. The activation of Si was characterized by XPS and the Ni-P coating by XPS and SEM. The electrochemical study did not show any real mechanism changes compared to the Ni-P deposition on a conductive surface.

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Thermophoretic deposition of palladium aerosol nanoparticles for electroless micropatterning of copper

Cited by 15 publications

References 18 publications

Site-specific growth and density control of carbon nanotubes by direct deposition of catalytic nanoparticles generated by spark discharge

Site-specific growth and density control of carbon nanotubes by direct deposition of catalytic nanoparticles generated by spark discharge

Aerosol palladium activation for electroless copper deposition and heat treatment with NO injection to fabricate Cu oxide/carbon fibre

Electroless deposition of Ni-P on a silicon surface

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