Thick LiNbO3 layers on diamond-coated silicon for surface acoustic wave filters

Dogheche, El Hadj; Sadaune, Véronique; Lansiaux, X.; Rémiens, Denis; Gryba, T.

doi:10.1063/1.1501156

Cited by 26 publications

(14 citation statements)

References 6 publications

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“…This combination of material has been already tested and provides an attractive solution for very high frequency large band filtering applications. 22 Here, the carbon layer thickness was arbitrarily fixed to 20 m but of course a comprehensive optimization of this configuration would require to vary this parameter too. For the present illustration, the f t product only holds for the LiNbO 3 layer.…”

Section: Linbo 3 õC-diamondõ"100… Siliconmentioning

confidence: 99%

Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation

Ballandras

Reinhardt

Laude

et al. 2004

Journal of Applied Physics

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Section: Linbo 3 õC-diamondõ"100… Siliconmentioning

confidence: 99%

Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation

Ballandras

Reinhardt

Laude

et al. 2004

Journal of Applied Physics

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“…They are widely used in nondestructive evaluation (NDE) [5,6,7,8], medical diagnoses and therapy [9,10,11], communications [12,13,14], and underwater acoustics [15,16]. The electromechanical properties of the piezoelectric material are the determining factors for the performance of these electromechanical devices.…”

Section: Introductionmentioning

confidence: 99%

Relaxor-based ferroelectric single crystals: Growth, domain engineering, characterization and applications

Sun

Cao

2014

Progress in Materials Science

542

264

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In the past decade, domain engineered relaxor-PT ferroelectric single crystals, including (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT), (1-x)Pb(Zn1/3Nb2/3)O3-xPbTiO3 (PZN-PT) and (1-x-y)Pb(In1/2Nb1/2)O3-yPb(Mg1/3Nb2/3)O3-xPbTiO3 (PIN-PMN-PT), with compositions near the morphotropic phase boundary (MPB) have triggered a revolution in electromechanical devices owing to their giant piezoelectric properties and ultra-high electromechanical coupling factors. Compared to traditional PbZr1-xTixO3 (PZT) ceramics, the piezoelectric coefficient d33 is increased by a factor of 5 and the electromechanical coupling factor k33 is increased from < 70% to > 90%. Many emerging rich physical phenomena, such as charged domain walls, multi-phase coexistence, domain pattern symmetries, etc., have posed challenging fundamental questions for scientists. The superior electromechanical properties of these domain engineered single crystals have prompted the design of a new generation electromechanical devices, including sensors, transducers, actuators and other electromechanical devices, with greatly improved performance. It took less than 7 years from the discovery of larger size PMN-PT single crystals to the commercial production of the high-end ultrasonic imaging probe “PureWave”. The speed of development is unprecedented, and the research collaboration between academia and industrial engineers on this topic is truly intriguing. It is also exciting to see that these relaxor-PT single crystals are being used to replace traditional PZT piezoceramics in many new fields outside of medical imaging. The new ternary PIN-PMN-PT single crystals, particularly the ones with Mn-doping, have laid a solid foundation for innovations in high power acoustic projectors and ultrasonic motors, hinting another revolution in underwater SONARs and miniature actuation devices. This article intends to provide a comprehensive review on the development of relaxor-PT single crystals, spanning material discovery, crystal growth techniques, domain engineering concept, and full-matrix property characterization all the way to device innovations. It outlines a truly encouraging story in materials science in the modern era. All key references are provided and 30 complete sets of material parameters for different types of relaxor-PT single crystals are listed in the Appendix. It is the intension of this review article to serve as a resource for those who are interested in basic research and practical applications of these relaxor-PT single crystals. In addition, possible mechanisms of giant piezoelectric properties in these domain-engineered relaxor-PT systems will be discussed based on contributions from polarization rotation and charged domain walls.

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“…However, in this first attempt, the lithium niobate film was grown along its c-axis, leading to relatively weak piezoelectric coupling factors. Dogheche et al, in 2002, investigated a similar composite SAW structure, but based on a LiNbO 3 /diamond/silicon structure [25]. The advantage here is to benefit from a conventional silicon substrate.…”

Section: A Linbo 3 Thin-films For Saw Applicationsmentioning

confidence: 99%

Acoustic filters based on thin single crystal LiNbO<inf>3</inf> films: Status and prospects

Reinhardt

Benaissa

David

et al. 2014

2014 IEEE International Ultrasonics Symposium

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Lithium niobate has been extensively used in the Surface Acoustic Wave (SAW) industry for its excellent piezoelectric properties. In the last twelve years, the interest has been raised towards making this material available in the thin film form for SAW or Bulk Acoustic Wave (BAW) applications, and even for Lamb wave devices. This paper reviews both deposition or thin film transfer techniques to obtain lithium niobate thin films. It also gives a brief overview of the applications of these thin films. Finally, we open new perspectives for this technology with the emerging field of tunable acoustic filters, which need extremely large piezoelectric properties to demonstrate satisfying performance.

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Thick LiNbO3 layers on diamond-coated silicon for surface acoustic wave filters

Cited by 26 publications

References 6 publications

Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation

Simulations of surface acoustic wave devices built on stratified media using a mixed finite element/boundary integral formulation

Relaxor-based ferroelectric single crystals: Growth, domain engineering, characterization and applications

Acoustic filters based on thin single crystal LiNbO<inf>3</inf> films: Status and prospects

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