Thickness dependence of damage thresholds for 193-nm dielectric mirrors by predamage sensitive photothermal technique

Blaschke, Holger; Arens, Winfried; Ristau, Detlev; Martin, Sven; Li, Bincheng; Welsch, E.

doi:10.1117/12.379306

Cited by 6 publications

(3 citation statements)

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“…At present, people developed many methods to detect the laser-induced damage of filters, such as scattering light detection method [8] , pulsed thermal lens method [9] , photoacoustic beam deflection technique [10] , etc. These methods could only detect the damage qualitatively.…”

Section: Quantitative Evaluation Methodsmentioning

confidence: 99%

Laser-induced damage degree assessment for filters based on static Bayesian network

et al. 2013

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Two methods were described to quantitatively evaluate the damage of optical filters, which were through detecting the change of transmission coefficient and damaged area of optical filters. Based on the quantitative evaluation results, the laser-induced damage of optical filters was classified five damage degrees, which were undamaged, color changed, slight melt, middle melt and serious melt. The laser-induced damage was uncertain event because there were many uncertain factors to affect the laser-induced damage degree of optical filters. In view of the advantage of the Bayesian network in processing indefinite information, this paper emphatically studied the laser-induced damage degree assessment method of optical filters based on Static Bayesian network. A Bayesian model was constructed to assess the damage degree of filters. Upon our laser-induced damage experiments on the optical filters, the results of the quantitative evaluation were compared with the assessment results of Bayesian network model, which indicated that Bayesian network method was available to assess the laser-induced damage degree of optical filters.

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Section: Quantitative Evaluation Methodsmentioning

confidence: 99%

Laser-induced damage degree assessment for filters based on static Bayesian network

et al. 2013

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“…Up to now, enhanced optics with all-fluoride or all-oxide coatings were investigated fundamentally [1][2][3]. Additionally, enhanced metal coatings have been studied in the DUV/VUV spectral range depositing a fluoride overcoating on the basic aluminum layer [4].…”

Section: Introductionmentioning

confidence: 99%

Dynamic absorptance behavior of hybrid multilayers at 193 nm

et al. 2002

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In previous years different multilayer systems were investigated with respect to their optical performance at the wavelength 193 nm of the ArF excimer laser. For most applications in this spectral range, fluoride coatings have been qualified and are widely established. Even though the applicability of oxide coatings is strongly restricted by the significant intrinsic absorptance of the Al203 component, these materials are utilised for special technology fields.In contrast to the dielectric deposition materials, the potentiality of protected and enhanced metal layer systems has not been investigated in detail as a basis for high reflectivity minors at the wavelength of 193 nm. The major advantage of metal layers is their relatively high reflectivity which can be achieved at low film thickness. Thus metal layers can be employed as a substitution of the first HL-pairs in a high reflecting dielectric stack, and the number of layers can be drastically reduced. Furthermore, the upper residual fluoride stack shields the metal coating from the E-field improving the power handling capability of the metal layer structure.The present investigations are focused on the determination of the absorptance in dependence on the different number of fluoride HL-pairs in metal/dielectric layer systems. In order to elucidate this loss channel, the laser calorimetric (LCA) method in accordance to ISO 1 1551 is employed. The dynamic behaviour of the absorptance is measured on the basis of the thermal lens technique (ii) using the obtained data of the LCA method for calibration. With regard to both experimental methods, the absorptance can be defined in a wide range of fluence values including the damage onset, and the laser induced damage behaviour of the coatings can be studied. keywords: laser calorimetry, thermal lens technique, ISO 1 1 55 1 , LIDT, predamage, UV dielectric coatings, enhanced metal coatings

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“…This process is referred to as tunnel ionization. It has been shown that measuring the absorption behavior of a sample at several increasing intensities approaching the damage threshold, it may be possible to predict the LIDT without damage to the sample [1]. Measurements of the nonlinear absorption may be used to inform models describing the electronic behavior of a given material and allow for accurate predictions of the LIDT.…”

Section: Introductionmentioning

confidence: 99%

Determining the bandgap dependence of nonlinear absorption and laser induced damage threshold through numerical simulation and experiment

McCauley,

Ji,

Jupé

et al. 2023

Laser-Induced Damage in Optical Materials 2023

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Thickness dependence of damage thresholds for 193-nm dielectric mirrors by predamage sensitive photothermal technique

Cited by 6 publications

References 0 publications

Laser-induced damage degree assessment for filters based on static Bayesian network

Laser-induced damage degree assessment for filters based on static Bayesian network

Dynamic absorptance behavior of hybrid multilayers at 193 nm

Determining the bandgap dependence of nonlinear absorption and laser induced damage threshold through numerical simulation and experiment

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