Thickness dependence of optoelectronic properties in ALD grown ZnO thin films

Thickness dependent structural, optical and electrical properties of Ti-doped ZnO films prepared by atomic layer deposition

“…It is, however, more uncertain whether the crystallites adapt the shape as hexagonal bipyramids for films with even lower Ti concentration. A thickness-dependent study of pure ZnO films by Singh et al [10] deposited by ALD does show some similar behavior as in the current study. There appears to be an increase in the (100)-reflection and a notable decrease in the (002)-reflection with increasing film thickness, however, this trend is not completely clear.…”

“…ALD of ZnO films, however, usually deposits as polycrystalline films [9]. A similar change in orientation with thickness is also observed for pure ZnO films deposited by ALD [10]. The preferred orientation in ZnO depositions by ALD has previously been shown to vary with temperature [11], dopant concentration [12][13][14], pulse and purge lengths [15], electric field [16] and substrate [17].…”

Synthesis of ZnO nanoparticles with a novel combustion method and their C2H5OH gas sensing properties

“…This work was supported by Scientific Research Fund of Huaqiao University (No.10Y0195*) 11 and The Project Sponsored by the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry.…”

“…In this regard, metal oxide semiconductor (MOS) based gas sensors, such as SnO 2 [3], ZnO [4], TiO 2 [5], WO 3 [6] and In 2 O 3 [7] have been extensively studied because of their great potential applications in toxic and flammable gas detection. As a gas sensing material, ZnO possesses some unique advantages: a bandgap of 3.37 eV, large exciton binding energy of 60 meV, resistivity control over the range 10 −3 ∼10 5 Ω·cm, high transparency in the visible range, excellent chemical and thermal stability under the operating condition, thus ZnO has been widely applied in the field of gas/chemical sensors [8][9], optoelectronics [10], laser diodes [11], piezotronics [12], and field emission devices [13].…”

Annealing dependence on flexible p-CuGaO2/n-ZnO heterojunction diode deposited by RF sputtering method

“…Transparent conducting oxide (TCO) thin films have been extensively studied because it's have very interesting properties in various electrical and optical application such as gas sensor, light-emitting diodes, solar cells, thin-film transistors and varistor [1,2]. ZnO have become a promising TCO materials due to its nontoxic, inexpensive and abundant material compared to ITO that once was a commonly used materials [3][4][5][6].…”