2005
DOI: 10.1016/j.apsusc.2005.01.041
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Thickness distribution of carbon nitride films grown by inverse-pulsed laser deposition

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Cited by 23 publications
(7 citation statements)
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“…Monte Carlo simulations of Morozov proved that up to 20 % of atoms could be back reflected depending on the background pressure [28]. Égerházi et al also demonstrated that this backward scattering of the ablated fragments has practical application possibility for example in thin-layer deposition (inverse PLD) [29]. Depending on the quantity of the clusters and nanoparticles deposited on the surface, a diffusionlimited aggregation can start forming a cluster-assembled coral-like structure, as shown by Rode et al when ablating glassy carbon with a high repetition rate femtosecond laser [23].…”
Section: Discussionmentioning
confidence: 99%
“…Monte Carlo simulations of Morozov proved that up to 20 % of atoms could be back reflected depending on the background pressure [28]. Égerházi et al also demonstrated that this backward scattering of the ablated fragments has practical application possibility for example in thin-layer deposition (inverse PLD) [29]. Depending on the quantity of the clusters and nanoparticles deposited on the surface, a diffusionlimited aggregation can start forming a cluster-assembled coral-like structure, as shown by Rode et al when ablating glassy carbon with a high repetition rate femtosecond laser [23].…”
Section: Discussionmentioning
confidence: 99%
“…Other arrangements (shape of targets, positioning of substrates) are possible. For example, the substrate can be placed elsewhere with respect to the plume, and can be positioned such as to have its surface parallel to the direction of the plume propagation rather than perpendicular [25] or even in the plane of the target [26]. Other arrangements are discussed in earlier reviews (for example [5]).…”
Section: Development Of Pldmentioning
confidence: 99%
“…Therefore we have a common central part and some difference around the edges. For qualitative comparison with experimental data [23], it is convenient to present the very same profiles in dimensional units (figure 1(a)). Such a representation allows us to reveal nonobvious features of the backward deposition.…”
Section: Numerical Resultsmentioning
confidence: 99%
“…Since the primary aim of this study is to be a first approach to model IPLD experiments [23], the main set of parameters was taken from real experimental conditions. The mass ratio of M = 0.43 corresponds to carbon as target material and nitrogen as background gas.…”
Section: Formulation Of the Problemmentioning
confidence: 99%
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