Thickness Measurement of Thin Film Based on White-Light Spectral Interferometry

Coating Qualities Evaluation for Alkali-Metal Atomic Vapor Cells Based on Frustrated Total Internal Reflection

“…where ∆𝑑 is the variation of the gap thickness which can indicate the measuring accuracy of the coating thickness, and ∆𝑅 can be seen as the detecting resolution of the reflection. Equation (8) shows that accuracy of the coating thickness measurement can be better than 1 nm if the resolution of the reflection is lower than 0.2%. Furthermore, the variation of the air gap within the middle range is lower, which is shown in Fig.…”