Thin-Film Piezoelectric Actuators for Bio-Inspired Micro-Robotic Applications

Oldham, Kenn R.; Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Ranade, Prashant; Dubey, Madan

doi:10.1080/10584580701756482

Cited by 29 publications

(23 citation statements)

References 6 publications

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“…The specimens in this study were 10 M NiMnGa singlecrystals produced by Adaptamat Inc. and cut along the 110 crystallographic axis into cuboids of dimensions 5(L) × 1(H) × 2(W) mm 3 . Before the dynamic magnetomechanical experiments, the amount of martensitic reorientation under a static magnetic field was evaluated.…”

Section: Preliminary Quasistatic Characterization Of Specimens' Magnementioning

confidence: 99%

“…The key characteristics for powerful propulsion are large and quick strokes [3,4]; however, conventional active materials are limited in at least one of these characteristics. For example, piezoelectric materials provide small amounts of strain while shape memory alloys (SMA) have slow response times [5,6].…”

Section: Introductionmentioning

confidence: 99%

“…Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. 3 Present address: GRAB Lab, Yale University, New Haven, CT 06511, USA.…”

Section: Introductionmentioning

confidence: 99%

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Ferromagnetic shape memory flapper for remotely actuated propulsion systems

Kanner

Shilo

Sheng

et al. 2013

Smart Mater. Struct.

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Generating propulsion with small-scale devices is a major challenge due to both the domination of viscous forces at low Reynolds numbers as well as the small relative stroke length of traditional actuators. Ferromagnetic shape memory materials are good candidates for such devices as they exhibit a unique combination of large strains and fast responses, and can be remotely activated by magnetic fields. This paper presents the design, analysis, and realization of a novel NiMnGa shear actuation method, which is especially suitable for small-scale fluid propulsion. A fluid mechanics analysis shows that the two key parameters for powerful propulsion are the engineering shear strain and twin boundary velocity. Using high-speed photography, we directly measure both parameters under an alternating magnetic field. Reynolds numbers in the inertial flow regime (>700) are evaluated. Measurements of the transient thrust show values up to 40 mN, significantly higher than biological equivalents. This work paves the way for new remotely activated and controlled propulsion for untethered micro-scale robots.

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Section: Preliminary Quasistatic Characterization Of Specimens' Magnementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Ferromagnetic shape memory flapper for remotely actuated propulsion systems

Kanner

Shilo

Sheng

et al. 2013

Smart Mater. Struct.

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“…The development of new methods to study the responses of materials and devices to thermal stimuli could enable new fundamental insights and applications in micro-robotics [1][2][3][4], thermal-electric generators [5][6][7], and biomedical sensors [8][9][10][11]. The thermal-electrical response is also important from an energy scavenging perspective, as 60% of energy currently produced from all sources in the United States is lost in the form of wasted heat [12].…”

Section: Introductionmentioning

confidence: 99%

Pyro-paraelectricity

Chin

Sheng

Huang

et al. 2015

Extreme Mechanics Letters

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The electrical responses of materials and devices subjected to thermal inputs, such as the Seebeck effect and pyroelectricity, are of great interest in thermal-electric energy conversion devices. Of particular interest are phenomena which exploit heterogeneities in the mechanics of heterostructured materials and systems for novel and unexplored thermal-electric responses. Here we introduce a new mechanism for converting thermal stimuli into electricity via structural heterogeneities, which we term "pyro-paraelectricity." Specifically, when a paraelectric material is grown on a substrate with a different lattice constant, the paraelectric layer experiences an inhomogeneous strain due to the lattice mismatch, establishing a strain gradient along the axis of the layer thickness. This strain gradient, induced via the lattice mismatch, can be multiple orders of magnitude higher than strain gradients in bulk materials imparted by mechanical bending (0.1 m -1 ). Consequently, charge separation is induced in the paraelectric layer via flexoelectricity, leading to a polarization in proportion to the dielectric constant. The dielectric constant, and thus the polarization, in turn changes with temperature. Therefore, when a strained metal-insulator-metal (MIM) heterostructure is subjected to a thermal input, changes in the permittivity generate an electrical response. We demonstrate this concept of "pyro-paraelectricity" by employing a MIM heterostructure with a high permittivity sputtered barium strontium titanate (BST) film as the insulating layer in a platinum sandwich. The resulting strain gradient of more than 10 4 m -1 due to the structural heterogeneity was verified by an X-ray diffraction scan. To demonstrate "pyro-paraelectricity," the MIM heterostructure was subjected to a thermal input, thereby generating current which was highly correlated to the thermal input. A theoretical model was found to be consistent with the experimental data. These results prove the existence of "pyro-paraelectricity."

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“…For those applications in which on-chip actuators (electrostatic inchworm motors [5], piezoelectrics [6], etc.) will ultimately be employed, magnetic actuation provides a convenient method for testing.…”

Section: Introductionmentioning

confidence: 99%

Magnetic actuation of ultra-compliant micro robotic mechanisms

Vogtmann

Bergbreiter

2014

2014 IEEE/RSJ International Conference on Intelligent Robots and Systems

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This work presents highly flexible elastomer and silicon micro robotic mechanisms actuated using embedded permanent magnets manipulated by an external magnetic field. The mechanisms are fabricated using a process to incorporate elastomer hinges and other features into silicon MEMS, and a method for embedding small magnets via press-fit into an elastomer sleeve. Fabricated mechanisms have demonstrated inplane bending, out of plane bending, and underactuated compliant gripping. In-plane bending mechanisms have achieved up to 150 • of deflection, out of plane bending mechanisms have achieved up to 90 • bending perpendicular to the surface of the chip, and the 4.4 mm x 3.8 mm x 0.3 mm gripper can passively grip objects up to 1.5 mm in size and as small as 0.5 mm. The mechanisms demonstrated can be used as actuated portions of larger mechanisms, for out-of-plane assembly, or for on-chip manipulation.978-1-4799-6934-0/14/$31.00 ©2014 IEEE

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Thin-Film Piezoelectric Actuators for Bio-Inspired Micro-Robotic Applications

Cited by 29 publications

References 6 publications

Ferromagnetic shape memory flapper for remotely actuated propulsion systems

Ferromagnetic shape memory flapper for remotely actuated propulsion systems

Pyro-paraelectricity

Magnetic actuation of ultra-compliant micro robotic mechanisms

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