Thin Film Piezoelectrics for MEMS

Trolier-McKinstry, Susan; Muralt, Paul

doi:10.1007/0-387-23319-9_10

Cited by 103 publications

(146 citation statements)

References 59 publications

Supporting

Mentioning

141

Contrasting

Unclassified

Order By: Relevance

“…where D i is the dielectric displacement and d im is a matrix of the the piezoelectric strain coefficients [40,62,69]. Typical values for these parameters are given in Table 2.1.…”

Section: Piezoelectric Sensorsmentioning

confidence: 99%

Investigation into use of piezoelectric sensors in a wheeled robot tire for surface characterization

Armstrong

Sandu

Taheri

2015

Journal of Terramechanics

View full text Add to dashboard Cite

A differential steered, 13.6 kg robot was developed as an intelligent tire testing system and was used to investigate the potential of using piezoelectric film sensors in small tube-type pneumatic tires to characterize tire-ground interaction.One focus of recent research in the tire industry has been on instrumenting tires with sensors to monitor the tire, vehicle, or external environment. On small robots, tire sensors that measure the forces and deflections in the contact patch could be used to improve energy efficiency and/or mobility during a mission.The robot was assembled from a SuperDroid Robots kit and instrumented with low-cost piezoelectric film sensors from Measurement Specialties between the inner tube and the tire. An unlaminated and a laminated sensor were placed circumferentially along the tread and an unlaminated sensor was placed along the sidewall. A slip ring transferred the signals from the tire to the robot. There, the signal conditioning circuit extended the time constant of the sensors and filtered electromagnetic interference. The robot was tested with a controlled power sequence carried out on polished cement, ice, and sand at three power levels, two payload levels, and with two tire sizes.The results suggest that the sensors were capable of detecting normal pressure, deflection, and/or longitudinal strain. Added payload increased the amplitude of the signals for all sensors. On the smaller tires, sensors generally recorded a smaller, wider signal on sand compared to cement, indicating the potential to detect contact patch pressure and length. The signals recorded by the unlaminated sensor along the tread of the smaller tire were lower on ice compared to cement, indicating possible sensitivity to tractive force. Results were less consistent for the larger tires, possibly due to the large tread pattern.

show abstract

“…where D i is the dielectric displacement and d im is a matrix of the the piezoelectric strain coefficients [40,62,69]. Typical values for these parameters are given in Table 2.1.…”

Section: Piezoelectric Sensorsmentioning

confidence: 99%

Investigation into use of piezoelectric sensors in a wheeled robot tire for surface characterization

Armstrong

Sandu

Taheri

2015

Journal of Terramechanics

View full text Add to dashboard Cite

show abstract

“…This shows that the PZT-Ge composite has low attenuation and high phase velocity, which indicates that the wave signal can travel longer distances in this structure. This is attributed to the fact that the characteristics of the composites consisting of thin-layered structures are dominated by the layer properties Trolier-Mckinstry and Muralt 2004]. Moreover, the generalised Rayleigh surface waves usually follow the interface surface as their guiding surface by causing less disturbance to the core material than in the patch.…”

Section: Numerical Results and Discussionmentioning

confidence: 99%

Modelling of acoustodiffusive surface waves in piezoelectric-semiconductor composite structures

Sharma

Kumar

2011

J. Mech. Mater. Struct.

View full text Add to dashboard Cite

We investigate the propagation of interfacial surface waves in a composite consisting of homogeneous isotropic semiconductor halfspace coated with a thin layer of homogeneous, transversely isotropic, piezoelectric material. The mathematical model of the problem consists of a coupled system of partial differential equations of motion, diffusion of electrons, and a Gauss equation along with the boundary conditions to be satisfied at the interface and free surface of the composite structure.The secular equation that governs the wave propagation at the interface has been obtained in compact form after solving the mathematical model analytically. The secular equations in the case of stressfree, isoconcentrated and stress-free, impermeable semiconductor halfspaces have also been deduced as special cases. The complex secular equation has been solved using the functional iteration method along with the irreducible Cardano's method via MATLAB programming for CdSe-Si, CdSe-Ge, PZT-Si and PZT-Ge composite structures.The computer-simulated results have been presented graphically in terms of phase velocity, attenuation coefficient, and specific loss factor of energy dissipation versus wave number and lifetime of charge carrier field in the considered structures. The work may be useful for the construction and design of surface acoustic wave devices.

show abstract

“…The only accelerometer with piezoelectric thick film (>5 μm thick) has been presented by Beeby et al [4]. Piezo electric thin film in MEMS has been studied intensively [5]. However for high bandwidth applications accelerometers with piezoelectric thick films result in significant higher voltage sensitivity for a given bandwidth.…”

Section: Introductionmentioning

confidence: 99%