Thin film PVDF sensors applied to high acceleration measurements

Andre, B.; Clot, J.; Partouche, E.; Simonne, J.J.; Bauer, F.

doi:10.1016/0924-4247(92)80239-y

Cited by 20 publications

(6 citation statements)

References 3 publications

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“…The inset shows the front side of the accelerometer with zoom-in of the interdigitated electrodes (from [197]). These accelerometer designs exploiting the direct piezoelectric effect have been made from various materials such as ZnO [186][187][188][189], AlN [27,190], PZT [191][192][193][194][195][196][197] and PVDF [198][199][200][201][202][203]. Typically, these accelerometers use a proof mass in the range of 1-10 mg made out of bulk micromachined silicon which is connected to the silicon substrate frame using flexural structures on which the piezoelectric thin film is integrated using several of the deposition techniques discussed earlier.…”

Section: Ferroelectric Thin Film Infrared Detectorsmentioning

confidence: 99%

Piezoelectric MEMS sensors: state-of-the-art and perspectives

Tadigadapa¹,

Mateti

2009

Meas. Sci. Technol.

520

257

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Over the past two decades, several advances have been made in micromachined sensors and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a clear need for the integration of materials other than silicon and its compounds into micromachined transducers has emerged. Piezoelectric materials are high energy density materials that scale very favorably upon miniaturization and that has led to an ever-growing interest in piezoelectric films for MEMS applications. At this time, piezoelectric aluminum-nitride-based film bulk acoustic resonators (FBAR) have already been successfully commercialized. Future innovations and improvements in inertial sensors for navigation, high-frequency crystal oscillators and filters for wireless applications, microactuators for RF applications, chip-scale chemical analysis systems and countless other applications hinge upon the successful miniaturization of components and integration of piezoelectrics and metals into these systems. In this article, a comprehensive review of micromachined piezoelectric transducer technology will be presented. Piezoelectric materials in bulk and thin film forms will be reviewed and fabrication techniques for the integration of these materials for microsensor applications will be presented. Recent advances in various piezoelectric microsensors will be presented through specific examples. This review will conclude with a critical assessment of the future trends and promise of this technology.

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Section: Ferroelectric Thin Film Infrared Detectorsmentioning

confidence: 99%

Piezoelectric MEMS sensors: state-of-the-art and perspectives

Tadigadapa¹,

Mateti

2009

Meas. Sci. Technol.

520

257

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“…Poly(vinylidene fluoride) (PVDF) is a popular polymer among researchers due to its piezo and pyroelectric properties. In addition, PVDF films have properties like flexibility, biocompatibility, low acoustic impedance etc., which are extensively used in the field of sensors and actuators [1][2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Study of $$\upbeta $$ β -phase development in spin-coated PVDF thick films

2017

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A study was conducted to ascertain the effect of variation in spin speed and baking temperature on β-phase content in the spin-coated poly(vinylidene fluoride) (PVDF) thick films (∼4−25 μm). Development of β-phase is dependent on film stretching and crystallization temperature. Therefore, to study the development of β-phase in films, stretching is achieved by spinning and crystallization temperature is adjusted by means of baking. PVDF films are characterized using Fourier transform infrared spectroscopy, X-ray diffraction, differential scanning calorimetry, and scanning electron microscopy. It is observed that crystallization temperature lower than 60 • C and increase in spin speed increases the β-phase content in PVDF films. Crystallization temperature above 60 • C reduces β-phase content and increases α-phase content. It was also observed that viscosity of the PVDF solution affects the β-phase development in films at a particular spin speed.

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“…Keeping in mind micromachined sensors, thin film polymers such as polyvinylidene fluoride or PVDF [96][97][98][99][100][101][102] and ceramics such as zinc oxide [96,[103][104][105][106], PZT [96,[107][108][109][110][111][112][113] and aluminum nitride [96,114,115] are used in MEMS and other micromachined sensors as they exhibit piezoelectricity several orders greater than that of quartz and its derivatives [90,92]. Further, they can be deposited using common micromachining processes making them suitable for mass production [90,96,[116][117][118].…”

Section: Piezoelectric Sensorsmentioning

confidence: 99%