Thin Film Shape Memory Alloy Microactuators

Krulevitch, Peter A; Lee, Abraham P.; Ramsey, P.B.; Trevino, J.; Northrup, M. Allen

doi:10.1115/imece1996-1365

Cited by 3 publications

(1 citation statement)

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“…Advances in microelectromechanical (MEMS) technology have led to several attempts to develop micro-scale biopsy tools. Lee et al [5] fabricated a micro-gripper using deposition of shape memory alloy (SMA) on silicon substrates and Krulevitch et al [6,7] reported micro-fabricated instruments for micro-biopsy and precision cutting.…”

Section: Introductionmentioning

confidence: 99%

Barbed micro-spikes for micro-scale biopsy

Byun

Lim

Paik

et al. 2005

J. Micromech. Microeng.

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Single-crystal silicon planar micro-spikes with protruding barbs are developed for micro-scale biopsy and the feasibility of using the micro-spike as a micro-scale biopsy tool is evaluated for the first time. The fabrication process utilizes a deep silicon etch to define the micro-spike outline, resulting in protruding barbs of various shapes. Shanks of the fabricated micro-spikes are 3 mm long, 100 µm thick and 250 µm wide. Barbs protruding from micro-spike shanks facilitate the biopsy procedure by tearing off and retaining samples from target tissues. Micro-spikes with barbs successfully extracted tissue samples from the small intestines of the anesthetized pig, whereas micro-spikes without barbs failed to obtain a biopsy sample. Parylene coating can be applied to improve the biocompatibility of the micro-spike without deteriorating the biopsy function of the micro-spike. In addition, to show that the biopsy with the micro-spike can be applied to tissue analysis, samples obtained by micro-spikes were examined using immunofluorescent staining. Nuclei and F-actin of cells which are extracted by the micro-spike from a transwell were clearly visualized by immunofluorescent staining.

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Section: Introductionmentioning

confidence: 99%

Barbed micro-spikes for micro-scale biopsy

Byun

Lim

Paik

et al. 2005

J. Micromech. Microeng.

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Materials issues in microelectromechanical systems (MEMS)

2000

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Micro and Macro Deformation of Single Crystal NiTi

Gall

Dunn

Liu

et al. 2002

Journal of Engineering Materials and Technology

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We present experimental results on the instrumented Vickers micro-indentation and compression of solutionized Ni-rich NiTi single crystals. The tests are conducted at room temperature where the solutionized Ti-50.9 at percent Ni material is 18 degrees above Af and the solutionized Ti-51.5 at percent Ni material is more than 100 degrees above Af. Aside from elastic deformation, it is discovered that dislocation motion and a reversible stress-induced martensitic transformation influence the micro-indentation response of Ti-50.9 at percent Ni, while the micro-indentation of Ti-51.5 at percent Ni only induces irreversible dislocation motion. The effect of the surface normal orientation on material hardness was negligible in the Ti-51.5 at percent Ni and followed trends anticipated by the activation of favorable slip systems in the Ti-50.9 at percent Ni. Compression tests on the identical Ti-50.9 at percent Ni samples revealed deformation by coupled stress-induced martensite and plastic flow, depending on the crystallographic orientation. The trends in hardness with surface normal orientation were not commensurate with the orientation dependence of the uniaxial compressive transformation or “yield” strength. The ramifications of the results in terms of comparing micro-indentation and macro-compression and the interactions between plasticity and the stress-induced martensitic transformation are discussed.

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Thin Film Shape Memory Alloy Microactuators

Cited by 3 publications

References 0 publications

Barbed micro-spikes for micro-scale biopsy

Barbed micro-spikes for micro-scale biopsy

Materials issues in microelectromechanical systems (MEMS)

Micro and Macro Deformation of Single Crystal NiTi

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