Thin-film silicon MEMS DNA sensors

Adrega, T.; Prazeres, D.M.F.; Chu, V.

doi:10.1016/j.jnoncrysol.2006.01.079

Cited by 10 publications

(5 citation statements)

References 17 publications

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“…Microelectromechanical systems (MEMS) have received significant attention over the last decades due to their prevalence in a wide range of applications. Small in size, low in weight and energy consumption, these systems are highly durable, making them preferred candidates for a vast array of devices, including accelerometers, relays, RF switches, filters, and sensing applications such as mass flow and chemical sensors, biosensors, immunosensors, or detectors capable of identifying the presence of proteins or DNA strands [1][2][3][4][5][6][7][8][9][10][11]. A MEMS affinity sensor that enables continuous monitoring of glucose for diabetes management, for instance, has been reported in literature [7].…”

Section: Introductionmentioning

confidence: 99%

“…The principle is based on the detection of viscosity changes due to affinity binding between glucose and a biocompatible, glucose-specific polymer. In the case of DNA sensors [11], the principle is based on the detection of the resonance frequency shift induced by the specific DNA immobilization on the resonator. Although various actuation methods for MEMS devices exist, electrostatic actuation is still the most preferred mode of actuation due to its simplicity and efficiency.…”

Section: Introductionmentioning

confidence: 99%

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Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Caruntu¹,

Martinez²,

Knecht

2012

Journal of Computational and Nonlinear Dynamics

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This paper uses the reduced order model (ROM) method to investigate the nonlinear-parametric dynamics of electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators under soft alternating current (AC) voltage of frequency near half natural frequency. This voltage is between the resonator and a ground plate and provides the actuation for the resonator. Fringe effect and damping forces are included. The resonator is modeled as a Euler-Bernoulli cantilever. ROM convergence shows that the five terms model accurately predicts the steady states of the resonator for both small and large amplitudes and the pull-in phenomenon either when frequency is swept up or down. It is found that the MEMS resonator loses stability and undergoes a pull-in phenomenon (1) for amplitudes about 0.5 of the gap and a frequency less than half natural frequency, as the frequency is swept up, and (2) for amplitudes of about 0.87 of the gap and a frequency about half natural frequency, as the frequency is swept down. It also found that there are initial amplitudes and frequencies lower than half natural frequency for which pull-in can occur if the initial amplitude is large enough. Increasing the damping narrows the escape band until no pull-in phenomenon can occur, only large amplitudes of about 0.85 of the gap being reached. If the damping continues to increase the peak amplitude decreases and the resonator experiences a linear dynamics like behavior. Increasing the voltage enlarges the escape band by shifting the sweep up bifurcation frequency to lower values; the amplitudes of losing stability are not affected. Fringe effect affects significantly the behavior of the MEMS resonator. As the cantilever becomes narrower the fringe effect increases. This slightly enlarges the escape band and increases the sweep up bifurcation amplitude. The method of multiple scales (MMS) fails to accurately predict the behavior of the MEMS resonator for any amplitude greater than 0.45 of the gap. Yet, for amplitudes less than 0.45 of the gap MMS predictions match perfectly ROM predictions.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Caruntu¹,

Martinez²,

Knecht

2012

Journal of Computational and Nonlinear Dynamics

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“…It is believed that microbridges may prove more stable than microcantilevers, although potentially at the expense of reduced sensitivity. To date, microbridges have not been extensively investigated for biosensing applications (Adrega et al, 2006;Lu et al, 2006). The principle strengths of micro-or nano-cantilever-based oligonucleotide sensors are easy functionalisation, ready optimisation through manipulation of the sensor geometry, and scalability, with existing fabrication techniques translating into the preparation of large arrays Ziegler, 2004).…”

Section: Target Reference(s)mentioning

confidence: 99%

Micro- and nano-structure based oligonucleotide sensors

Ferrier

Shaver

Hands

2015

Biosensors and Bioelectronics

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This paper presents a review of micro- and nano-structure based oligonucleotide detection and quantification techniques. The characteristics of such devices make them very attractive for Point-of-Care or On-Site-Testing biosensing applications. Their small scale means that they can be robust and portable, their compatibility with modern CMOS electronics means that they can easily be incorporated into hand-held devices and their suitability for mass production means that, out of the different approaches to oligonucleotide detection, they are the most suitable for commercialisation. This review discusses the advantages of micro- and nano-structure based sensors and covers the various oligonucleotide detection techniques that have been developed to date. These include: Bulk Acoustic Wave and Surface Acoustic Wave devices, micro- and nano-cantilever sensors, gene Field Effect Transistors, and nanowire and nanopore based sensors. Oligonucleotide immobilisation techniques are also discussed.

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“…Then, about the electrode formation, we used advanced microelectromechanical systems (MEMS) technology; which is widely used for fabrication of microsensor, providing many advantages such as high precision, high functionality and mass-production. But, some inflexible or brittle materials such as glass, silicon and polymer wafers (Piechotta et al 2005;Suzuki et al 2001;Pedersen et al 2004;Bang et al 2004;Adrega et al, 2006) have typically been used as substrates for those glucose sensors. In this work, a flexible PDMS membrane was used as substrate for electrode formation.…”

mentioning

confidence: 99%

A soft and flexible biosensor using a phospholipid polymer for continuous glucose monitoring

Chu

Kudo

Shirai

et al. 2009

Biomed Microdevices

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A flexible biosensor using a phospholipid polymer to immobilization of glucose oxidase (GOD) was fabricated and tested. At first, an enzyme membrane formed by immobilizing GOD onto a porous polytetrafluoroethylene (PTFE) membrane using the phospholipid polymer (2-methacryloyloxyethyl phosphorylcholine (MPC) copolymerized with 2-ethylhexylmethacrylate (EHMA):PMEH) was evaluated. According to the result of amperometric measurement, average density of GOD to be immobilized was optimized to 38.9 units cm(-2). Temperature and pH dependences were also investigated. Then, a flexible glucose sensor was fabricated by immobilizing GOD onto a flexible hydrogen peroxide electrode using PMEH. The flexible glucose sensor showed a linear relationship between output currents and glucose concentration in 0.05-1.00 mmol L(-1), with a correlation coefficient of 0.999. The calibration range covered the normal tear glucose level of 0.14-0.23 mmol L(-1). This indicates that the flexible biosensor is considered to be useful for monitoring of glucose in tear fluids.

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Thin-film silicon MEMS DNA sensors

Cited by 10 publications

References 17 publications

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers

Micro- and nano-structure based oligonucleotide sensors

A soft and flexible biosensor using a phospholipid polymer for continuous glucose monitoring

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