Thin-film UV VCSELs and LEDs by electrochemical etching

Haglund, Åsa; Hjort, Filip; Enslin, Johannes; Bergmann, Michael Alexander; Cobet, Munise; Cardinali, Giulia; Prokop, Nando; Persson, Lars; Guttmann, Martin; Sulmoni, Luca; Ploch, Neysha Lobo; Kolbe, Tim; Gustavsson, Johan S.; Ciers, Joachim; Wernicke, Tim; Kneissl, Michael

doi:10.1117/12.2612369

Light-Emitting Devices, Materials, and Applications XXVI 2022

DOI: 10.1117/12.2612369

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Thin-film UV VCSELs and LEDs by electrochemical etching

Åsa Haglund

Filip Hjort

Johannes Enslin

et al.

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Thin-film UV VCSELs and LEDs by electrochemical etching

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