“…Consequently, the voltage drop over the tunable capacitor can be reduced while the power handling can be increased. This technique can be applied to any kind of tunable capacitors as described in [14], specifically for the case of BST tunable capacitors according to [15] and for MEMS tunable capacitors as reported in [16]. In this paper, a similar concept is applied to DTCs.…”
Section: Power Handling Of the Dtc Tuning Elementmentioning
“…Consequently, the voltage drop over the tunable capacitor can be reduced while the power handling can be increased. This technique can be applied to any kind of tunable capacitors as described in [14], specifically for the case of BST tunable capacitors according to [15] and for MEMS tunable capacitors as reported in [16]. In this paper, a similar concept is applied to DTCs.…”
Section: Power Handling Of the Dtc Tuning Elementmentioning
“…If the antenna were directly connected to the 13.56 MHz rf power source, the power transfer from the source to antenna would be inefficient because of impedance mismatch [59,60]. Preferably, the plasma has to absorb all of the power transmitted from the source.…”
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