Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect

Larramendy, Florian; Mazenq, Laurent; Temple‐Boyer, Pierre; Nicu, Liviu

doi:10.1039/c1lc20810a

Cited by 14 publications

(8 citation statements)

References 19 publications

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“…Once the transistors and interconnections ended (figures 4), we realized covered fluidic channels, using the SU8-3D technique [12], which has been optimized for 5 µm wide channels (figure 5). Firstly, concerning MOSFET characterizations, we obtained very low subthreshold current: 10 -14 A for Vg = 2V and low leakage currents through the gate (figure 6).…”

Section: Nanoisfet Structurementioning

confidence: 99%

Design, realization and characterization of silicon nanowire ion sensitive field effect transistors

Lale¹,

Grappin²,

Scheid³

et al. 2016

2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)

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The aim of our research project is to achieve a potentiometric multi-sensor platform, consisting of ion sensitive field effect transistors ISFET and MOSFET, which channel is a nanowire or a network of horizontal Silicon nanowires and whose gate insulator is alumina Al2O3 deposed by Atomic Layer deposition ALD. This microdevice will provide chemical and biological analyses in the liquid phase, in microfluidic channels.

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Section: Nanoisfet Structurementioning

confidence: 99%

Design, realization and characterization of silicon nanowire ion sensitive field effect transistors

Lale¹,

Grappin²,

Scheid³

et al. 2016

2016 IEEE Nanotechnology Materials and Devices Conference (NMDC)

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“…Figure 1 shows a schematic of the SiO2/Si3N4/Ti/Au MISFET device. A 50 µm-thick SU-8 photoresist layer was patterned to fabricate 10 µm-wide and 35 µm-high 3D microfluidic channels as well as micro-tanks and neurons areas of reception using the "Stepper technology" [27].…”

Section: Design and Fabrication Of Biosensorsmentioning

confidence: 99%

MISFET-based biosensing interface for neurons guided growth and neuronal electrical activities recording

Larramendy

Bendali

Blatché

et al. 2014

Sensors and Actuators B: Chemical

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International audienceA hybrid circuit of a transistor-based chip was implemented and characterized for the neuronal electrical activity recording. The integration of microfluidic architectures was developed to control precisely neurites outgrowth and form topologically defined and stable neural networks. Individual neural cells from rat retinae and Lymnaea stagnalis snails were immobilized on gates regions of Metal Insulator Semiconductor Field Effect Transistors (MISFET). Neuronal orientation was achieved in both cases but neuronal action potentials were only recorded in the Lymnaea stagnalis case. They were successfully triggered and inhibited by implementing a picrotoxin-GABA – picrotoxin injection protocol, exhibiting a direct influence of picrotoxin on the "spike type" action potential waveform. The implementation of the whole process of neuronal culture and subsequent activity monitoring constitutes a proof-of-principle experiment for the development of neuroelectronic systems for signal processing studies adapted to low-density neuronal cultures

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“…Finally, wafer-level packaging process was performed using the SU-8 technology. In our case, SU-8, a commonly used epoxy-based negative photo-resist was used to define the gate area, to passivate the chip surface, to isolate the electrical connections from the liquid environment and to fabricate fluidic micro devices while using the "stepper technology" in a non-standard way [19].…”

Section: A Mosfet/chemfet Microdevices Fabricationmentioning

confidence: 99%

Parallel detection in liquid phase of N-channel MOSFET/ChemFET microdevices using saturation mode

Larramendy

Mathieu

Charlot

et al. 2013

Sensors and Actuators B: Chemical

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MOSFET and ChemFET are currently being used in many types of applications for the measurement of electrochemical potential and pH in liquid phase. This paper presents the realization of an analysis micro device including the micro sensor chip, the on-board electronic and the associated fluidics. The whole micro system can be easily transported, used for cellular cultures monitoring or chemical test thanks to a specific electronic interface. Using the transistor saturation mode, this interface enables both static and dynamic measurements for ChemFET and MOSFET-based devices, reducing electrical measurement interferences (up to 50dB) coming from the liquid phase.

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Three-dimensional closed microfluidic channel fabrication by stepper projection single step lithography: the diabolo effect

Cited by 14 publications

References 19 publications

Design, realization and characterization of silicon nanowire ion sensitive field effect transistors

Design, realization and characterization of silicon nanowire ion sensitive field effect transistors

MISFET-based biosensing interface for neurons guided growth and neuronal electrical activities recording

Parallel detection in liquid phase of N-channel MOSFET/ChemFET microdevices using saturation mode

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