2011
DOI: 10.1364/ome.1.000614
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Three-dimensional direct laser writing inspired by stimulated-emission-depletion microscopy [Invited]

Abstract: Three-dimensional direct laser writing has become a well established, versatile, widespread, and even readily commercially available "workhorse" of nano-and micro-technology. However, its lateral and axial spatial resolution is inherently governed by Abbe's diffraction limitation -analogous to optical microscopy. In microscopy, stimulated-emissiondepletion approaches have lately circumvented Abbe's barrier and lateral resolutions down to 5.6 nm using visible light have been achieved. In this paper, after very … Show more

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Cited by 278 publications
(286 citation statements)
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“…[1][2][3][4] Developments of new materials and illumination concepts like the STED lithography [5][6][7] have pushed the lateral dimensions of realizable structures below 100 nm. With the variability of the technology, several applications have emerged, e.g., in the field of micro-optics, where the fabrication of photonic crystals 8,9 or micro-optical elements [10][11][12][13] has been demonstrated.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] Developments of new materials and illumination concepts like the STED lithography [5][6][7] have pushed the lateral dimensions of realizable structures below 100 nm. With the variability of the technology, several applications have emerged, e.g., in the field of micro-optics, where the fabrication of photonic crystals 8,9 or micro-optical elements [10][11][12][13] has been demonstrated.…”
Section: Introductionmentioning
confidence: 99%
“…For example, stimulated emission depletion (STED), has enabled a sub-10-nm resolution to be achieved in far-field imaging [65] , and it has been employed in the femtosecond laser 3D nanofabrication by two-photon polymerization [66,67] . In addition, the spatiotemporal focusing techniques, which were originally developed for reducing out-of-focus noise [42] and enhancing the imaging speed [43] of multiphoton microscopy, have been employed in shaping the focal spot [44 -46] and increasing the 3D fabrication throughput [51,52] .…”
Section: Discussionmentioning
confidence: 99%
“…Moreover, the resolution of the laser lithography can be push beyond the Rayleigh limit. Recently, the techniques based on a two-photon absorption or a stimulated emission depletion [1,2,3,4] have been demonstrated, which can lead to the impressive feature size reduction [5]. Most current laser writing approaches use a single-point writing with a highly focused laser beam [6,7].…”
Section: Introductionmentioning
confidence: 99%