Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching

Abstract

We demonstrate the three-dimensional microdrilling of glass by the multiphoton process with nonresonant femtosecond laser pulses and by the subsequent chemical etching. We use photomachinable glass which is sensitive to cw UV light of a wavelength shorter than 320 nm. After the focused irradiation of nonresonant femtosecond laser pulses at 400 nm and subsequent heat treatment, crystallites of Li2O·SiO2, which are more soluble in dilute hydrofluoric acid than matrix glass, precipitate in the focused area of the laser within the glass sample. After etching the crystallites, three-dimensional holes are formed in the glass sample. We produce straight and Y-branched holes in the glass sample. This technique can be applied to the fields of microoptics, microelectronics and microchemicals.

Manipulation of Gold Nanoparticles inside Transparent Materials

“…By using an Ag + ion-doped photosensitive glass, we have space-selectively precipitated silicate crystals inside the glass. [12] We believe it will be possible to spatially control the growth of other functional crystals in glasses. Recently, we have also succeeded in the fabrication of a grating of 400 nm in width by precipitating Au nanoparticles.…”

In-fiber microchannel device filled with a carbon nanotube dispersion for passive mode-lock lasing

“…Furthermore, glass modified by a femtosecond laser is etched at a much higher rate than pristine glass. This technique can be used for the fabrication of three-dimensional microfluidic devices and it does not require clean room facilities making it a fast, simple and cost-effective procedure [13,14].…”

“…This microfabrication technique relies on the significantly faster rate of chemical etching of glass that has been exposed to femtosecond laser pulses compared to the etching rate of pristine glass. The method also exploits the capability of femtosecond laser inscription to fabricate threedimensional structures in a highly controllable manner [13,14]. We demonstrate saturable absorption operation and mode-locked lasing in a highly integrated and compact configuration.…”

High Speed Photography of Laser Induced Forward Transfer (LIFT) of Single and Double-layered Transfer Layers for Single Cell Transfer

“…The modified region can be removed selectively by wet chemical etching, so that a microstructure is formed in the material [1][2]. Many different micro components, such as channels [1][2][3][4][5][6][7][8][9][10][11][12], mechanical elements [13][14][15], optical elements [16][17][18][19], sensors [20][21], lasers [22] and photonic crystals [23], have been formed using this method. One of the promising applications of these components is microfluidics for chemical and biological analysis [24][25][26].…”