Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

Ramsay, E.; Serrels, K. A.; Thomson, Martin J.; Waddie, Andrew J.; Warburton, Richard J.; Taghizadeh, M. R.; Reid, Derryck T.

doi:10.1016/j.microrel.2007.07.069

Cited by 7 publications

(7 citation statements)

References 16 publications

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“…The details of the prescription used to design the correct s-SIL for imaging at a given sub-surface depth have already been discussed. In a further analogy with two-photon fluorescence microscopy, we have also shown that the TOBIC effect can provide a means of generating ultra-high 2D and, in addition, 3D resolved imaging because the generation of significant photocurrent only occurs within one confocal parameter of the focused spot [2,21,67,68]. The results are illustrated in Figures 12-14 below.…”

Section: Solid Immersion Lens Microscopy Using Tobic Imagingmentioning

confidence: 78%

“…We have investigated this optical lever effect in detail for both the h-SIL and the s-SIL [2,21], not only because it plays an extremely important role in the imaging system as a whole, but because it was suggested and confirmed that there is an optical lever effect in the axial direction as well -although initially the axial dependency was not fully understood [22]. We carried out a detailed analysis on both types of SIL, examining the optical lever effect in the axial and lateral directions by using the ray tracing software ASAP (Breault Research Organization).…”

Section: Magnification Effects In Solid Immersion Lensesmentioning

confidence: 99%

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Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

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Abstract. Solid immersion lens (SIL) microscopy combines the advantages of conventional microscopy with those of near-field techniques, and is being increasingly adopted across a diverse range of technologies and applications. A comprehensive overview of the state-of-the-art in this rapidly expanding subject is therefore increasingly relevant. Important benefits are enabled by SIL-focusing, including an improved lateral and axial spatial profiling resolution when a SIL is used in laser-scanning microscopy or excitation, and an improved collection efficiency when a SIL is used in a light-collection mode, for example in fluorescence micro-spectroscopy. These advantages arise from the increase in numerical aperture (NA) that is provided by a SIL. Other SIL-enhanced improvements, for example spherical-aberration-free sub-surface imaging, are a fundamental consequence of the aplanatic imaging condition that results from the spherical geometry of the SIL. The theory of SIL imaging exposes the unique properties of SILs that provide advantages in applications involving the interrogation of photonic and electronic nanostructures. Such applications range from the sub-surface examination of the complex three-dimensional microstructures fabricated in silicon integrated circuits, to quantum photoluminescence and transmission measurements in semiconductor quantum dot nanostructures.

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Section: Solid Immersion Lens Microscopy Using Tobic Imagingmentioning

confidence: 78%

Section: Magnification Effects In Solid Immersion Lensesmentioning

confidence: 99%

Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

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“…The theoretical resolution limit of 203 nm is expected, assuming an NA of 3.4 (a half cone angle of 74°with a refractive index of 3.5 at 1340 nm). The total magnification of the system is 490Â , which takes into account of the n 2 magnification of the aSIL [9], 10Â objective (OBJ and L4 in Fig. 2) and 4Â relay lens (L6 and L7 in Fig.…”

Section: Methodsmentioning

confidence: 99%

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Ramsay

Stockbridge

et al. 2012

Microelectronics Reliability

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“…Mapping measurements were performed by translating the SIL with respect to the objective lens, using a motorized XYZ translation stage with a step precision of 0.1 µm and correcting for the ×n reduction in translation when focusing through h-SIL, due to the optical lever effect. 22 Electroluminescence images were collected using a thermoelectrically cooled CCD. More details of the analysis of GaN HEMTs using Raman thermography and electroluminescence microscopy can be found in Refs.…”

Section: Sil Fabrication and Testingmentioning

confidence: 99%

“…20 The h-SIL also reduces lateral or axial translation of the focal point by a factor of n, due the optical lever effect. 22 SILs have been implemented in two ways for back-side device measurements: Focusing through a separate lens placed on the sample surface, 19,22 or forming the substrate into solid immersion lens, as illustrated in Fig. 1(a), e.g., milled using diamond turning.…”

Section: Introductionmentioning

confidence: 99%

Solid immersion lenses for enhancing the optical resolution of thermal and electroluminescence mapping of GaN-on-SiC transistors

Pomeroy

Kuball

2015

Journal of Applied Physics

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Solid immersion lenses are shown to greatly enhance optical spatial resolution when measuring AlGaN/GaN HEMTs, taking advantage of the high refractive index of the SiC substrates commonly used for these devices. Solid immersion lenses can be applied to techniques such as electroluminescence emission microscopy and Raman thermography, aiding the development device physics models. Focused ion beam milling is used to fabricate solid immersion lenses in SiC substrates with a numerical aperture of 1.3. A lateral spatial resolution of 300 nm is demonstrated at an emission wavelength of 700 nm and an axial spatial resolution of 1.7±0.3 µm at a laser wavelength of 532 nm is demonstrated; this is an improvement of 2.5× and 5×, respectively, when compared with a conventional 0.5 numerical aperture objective lens without a SIL. These results highlight the benefit of applying the solid immersion lenses technique to the optical characterization of GaN HEMTs. Further improvements may be gained through aberration compensation and increasing the SIL numerical aperture.

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Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

Cited by 7 publications

References 16 publications

Solid immersion lens applications for nanophotonic devices

Solid immersion lens applications for nanophotonic devices

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Solid immersion lenses for enhancing the optical resolution of thermal and electroluminescence mapping of GaN-on-SiC transistors

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