Three-dimensional nanoprinting with charged aerosol focusing via an electrified mask

Shin, Jooyeon; Jung, Yoon-ho; Pikhitsa, Peter V.; Hur, Changnyeong; Cho, Wonjin; Jung, Wooik; Choi, Mansoo

doi:10.1016/j.addma.2022.103206

Cited by 7 publications

(6 citation statements)

References 38 publications

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“…Although a single pillar consisting of four different metals (Au, Ag, Cu, and Pd) was successfully printed, the dimensions of these metal layers varied from one another 25 , which is likely related to the difficulties in decoupling materials for printing. Moreover, these studies also demonstrated nanostructures printed within a sub-1-mm 2 area, with the smallest feature size reported as 70–100 nm 25 – 28 . Structural uniformity and miniaturization were often compromised while printing structures spread across larger areas 25 , 27 , 30 .…”

Section: Introductionmentioning

confidence: 81%

“…In a recent demonstration 24 , a laser source was used to shrink a hydrogel framework for printing multimaterials, with purity being the primary concern. The development of 3D nanoprinting techniques based on aerosols has advanced considerably in different respects 25 – 28 . Nevertheless, the ability to print multimaterials has remained elusive, mainly owing to its strong dependence on materials physics 29 , 30 .…”

Section: Introductionmentioning

confidence: 99%

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Metal 3D nanoprinting with coupled fields

Liu

Devaraj

et al. 2023

Nat Commun

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Metallized arrays of three-dimensional (3D) nanoarchitectures offer new and exciting prospects in nanophotonics and nanoelectronics. Engineering these repeating nanoarchitectures, which have dimensions smaller than the wavelength of the light source, enables in-depth investigation of unprecedented light–matter interactions. Conventional metal nanomanufacturing relies largely on lithographic methods that are limited regarding the choice of materials and machine write time and are restricted to flat patterns and rigid structures. Herein, we present a 3D nanoprinter devised to fabricate flexible arrays of 3D metallic nanoarchitectures over areas up to 4 × 4 mm2 within 20 min. By suitably adjusting the electric and flow fields, metal lines as narrow as 14 nm were printed. We also demonstrate the key ability to print a wide variety of materials ranging from single metals, alloys to multimaterials. In addition, the optical properties of the as-printed 3D nanoarchitectures can be tailored by varying the material, geometry, feature size, and periodic arrangement. The custom-designed and custom-built 3D nanoprinter not only combines metal 3D printing with nanoscale precision but also decouples the materials from the printing process, thereby yielding opportunities to advance future nanophotonics and semiconductor devices.

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Section: Introductionmentioning

confidence: 81%

Section: Introductionmentioning

confidence: 99%

Metal 3D nanoprinting with coupled fields

Liu

Devaraj

et al. 2023

Nat Commun

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“…[24] The fundamentals of this method are based on the works of Heiko Jacobs, Thomas Krinke and Hiroshi Fudouzi on particle deposition using Coulomb forces. [25][26][27][28] An electrostatic lens is a thin dielectric mask made of photo or electronic resist, [21,29] silicon nitride, [30] or silicon dioxide [31,32] with focusing holes of 200-400 nm. Fabrication of this lens requires the use of a DOI: 10.1002/pssr.202300492 A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work.…”

Section: Introductionmentioning

confidence: 99%

“…[ 24 ] The fundamentals of this method are based on the works of Heiko Jacobs, Thomas Krinke and Hiroshi Fudouzi on particle deposition using Coulomb forces. [ 25–28 ] An electrostatic lens is a thin dielectric mask made of photo or electronic resist, [ 21,29 ] silicon nitride, [ 30 ] or silicon dioxide [ 31,32 ] with focusing holes of 200–400 nm. Fabrication of this lens requires the use of a multi‐step and expensive lithographic process, and thus limits the prevalence of the IAAL method.…”

Section: Introductionmentioning

confidence: 99%

High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask

Efimov,

Patarashvili,

Maslennikov

et al. 2024

Physica Rapid Research Ltrs

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A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work. The presented approach is similar to deposition of material through a stencil and allows one to obtain lines 15 times smaller than the width of the gap in the mask. It is proposed to use ordinary PVC electrical tape as a mask instead of expensive photo or electronic resists. The work investigated the influence of a mask thickness (height) of 60–180 μm, a gap width of 120–380 μm, a substrate potential of 0.1–5 kV, and a deposition time of 10 and 120 min on the geometry and electrical properties of the lines. The substrate material was Si, and charged Au nanoparticles 60 nm in size synthesized by spark discharge were the building blocks of microstructures. Numerical modeling of the process of focusing nanoparticles in COMSOL qualitatively confirmed the found experimental dependencies. The electrical resistivity of the sintered lines is 6.34 times higher than that of bulk gold. The developed approach makes it possible to obtain high‐aspect microstructures, supports operation at atmospheric pressure, and is flexibly controlled in terms of the choice of materials.This article is protected by copyright. All rights reserved.

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“…Considering this, the charged aerosol-based 3D nanoprinting technique presents an appealing alternative. This parallel printing technique has fabricated an array of intricated 3D metal nanostructures under ambient conditions by utilizing electric field lines as a nanoscale printing tool, effectively guiding charged metallic aerosols to their designated positions. − Furthermore, it facilitates the production of 3D nanostructures that interact with light, as exemplified in numerous photonic applications such as surface-enhanced Raman spectroscopy sensors ,, and solar cells . The recent work demonstrates 3D plasmonic metamaterials with vertical resonance modes achieved through vertical split-ring resonators, exhibiting inherent design flexibility.…”

Section: Introductionmentioning

confidence: 99%

Angle-Resolved Polarimetry with Quasi-Bound States in the Continuum Plasmonic Metamaterials via 3D Aerosol Nanoprinting

Yang,

Jung,

Hur

et al. 2024

ACS Nano

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Three-dimensional (3D) plasmonic metamaterials, featuring wellarranged subwavelength nanostructures, facilitate effective coupling between electrical dipoles and incident electromagnetic waves. This coupling allows for unique optical responses including localized surface plasmon resonance (LSPR) and quasi-bound states in the continuum (q-BIC). While 3D plasmonic metamaterials with LSPR and q-BIC have been independently explored for sensors, achieving simultaneous optical responses in the near-infrared region remains challenging. Here, we present 3D plasmonic metamaterials that integrate LSPR and q-BIC within a single π-shaped plasmonic structure, fabricated using a 3D aerosol nanoprinting technique. This printing technique controls the local electrostatic field to precisely position charged metallic nanoaerosols, enabling parallel printing of π-shaped plasmonic structures under ambient conditions. The printed πshaped plasmonic structures exhibit two distinct optical modes: x-polarization-sensitive LSPR and transverse magnetic modesensitive q-BIC within the near-infrared region. Exploiting these dual optical responses, we demonstrate simultaneous polarization detection and incident angle analysis by integrating the π-shaped plasmonic structures into commercial Fouriertransform infrared spectroscopy, termed "numerical aperture-detective polarimetry". This approach holds promise for evaluating alignment in optical and imaging systems with light distribution analysis. Furthermore, the 3D aerosol nanoprinting technique provides an avenue for fabricating 3D plasmonic metamaterials with intricate geometries and optical properties, expanding their potential applications in nano-optics.

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Three-dimensional nanoprinting with charged aerosol focusing via an electrified mask

Cited by 7 publications

References 38 publications

Metal 3D nanoprinting with coupled fields

Metal 3D nanoprinting with coupled fields

High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask

Angle-Resolved Polarimetry with Quasi-Bound States in the Continuum Plasmonic Metamaterials via 3D Aerosol Nanoprinting

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