Three-Dimensional Self-Assembled Sensors in Thin-Film SOI Technology

Iker, F.; André, Nicolás; Pardoen, Thomas; Raskin, Jean‐Pierre

doi:10.1109/jmems.2006.886002

Cited by 29 publications

(18 citation statements)

References 24 publications

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“…2b). When two different materials are consecutively deposited to form a linear beam in microfabrication processes, strain mismatch across the layers causes internal stresses that force the beam to bend out-of-plane after release, resulting in a spontaneous curvature κ s (refs 8, 23, 24). When the same process is used to fabricate a bilayered ring of radius R (before release), the release adds a supplementary curvature κ s perpendicular to the original one (1/ R ), which amounts to overcurve the ring with a pre-set overcurvature (Supplementary Methods; Supplementary Fig.…”

Section: Resultsmentioning

confidence: 99%

Overcurvature describes the buckling and folding of rings from curved origami to foldable tents

et al. 2012

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Daily-life foldable items, such as popup tents, the curved origami sculptures exhibited in the Museum of Modern Art of New York, overstrained bicycle wheels, released bilayered microrings and strained cyclic macromolecules, are made of rings buckled or folded in tridimensional saddle shapes. Surprisingly, despite their popularity and their technological and artistic importance, the design of such rings remains essentially empirical. Here we study experimentally the tridimensional buckling of rings on folded paper rings, lithographically processed foldable microrings, human-size wood sculptures or closed arcs of Slinky springs. The general shape adopted by these rings can be described by a single continuous parameter, the overcurvature. An analytical model based on the minimization of the energy of overcurved rings reproduces quantitatively their shape and buckling behaviour. The model also provides guidelines on how to efficiently fold rings for the design of space-saving objects.

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Section: Resultsmentioning

confidence: 99%

Overcurvature describes the buckling and folding of rings from curved origami to foldable tents

et al. 2012

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“…Fabrication processes for resonant mechanical structures is well established, utilizing standard photolithographic techniques. While thermoresistive devices rely on constant power draw to induce heating, capacitive sensing options [39] for SAW based sensing result in comparatively reduced power draw. However, fabrication of SAW transducers requires less common piezoelectric materials, thus limiting integration with CMOS devices and placing potential constraints on the intended operating environment.…”

Section: Frequency Analogmentioning

confidence: 99%

“…Resonance frequency shifts were negligible in response to temperature, but fluid flow induced a pressure gradient across a SAW transducer, resulting in an observable phase shift [94]. Iker [39] MEMS fabrication techniques have long been able to create three-dimensional microstructures, which enables geometries that may be fine-tuned (in terms of sensitivity and range) for thermal flow sensing ( Figure 11). Self-assembling, interdigitated cantilever structures exhibit frequency changes in response to temperature, which is capacitively sensed [39].…”

Section: Frequency Analogmentioning

confidence: 99%

“…Iker [39] MEMS fabrication techniques have long been able to create three-dimensional microstructures, which enables geometries that may be fine-tuned (in terms of sensitivity and range) for thermal flow sensing ( Figure 11). Self-assembling, interdigitated cantilever structures exhibit frequency changes in response to temperature, which is capacitively sensed [39]. Figure 11.…”

Section: Frequency Analogmentioning

confidence: 99%

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Micromachined Thermal Flow Sensors—A Review

2012

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Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and operation modes available. Material properties relevant to micromachined thermal flow sensing and selection criteria are also presented. Finally, recent applications of micromachined thermal flow sensors are presented. Detailed tables of the reviewed devices are included.

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“…e l s e v i e r . c o m / l o c a t e / m e e achieved by magnetic lifting [22,23] or stress gradients [24,25]. In this research we have combined electrical connectivity with folding by capillary forces.…”

Section: Contents Lists Available At Sciencedirectmentioning

confidence: 99%

Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

Legrain¹,

Berenschot²,

Tas³

et al. 2015

Microelectronic Engineering

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Recently, we demonstrated controllable 3D self-folding by means of capillary forces of silicon-nitride microobjects made of rigid plates connected to each other by flexible hinges (Legrain et al., 2014). In this paper, we introduce platinum electrodes running from the substrate to the plates over these bendable hinges. The fabrication yield is as high as (77 ± 2)% for hinges with a length less than 75 μm. The yield reduces to (18 ± 2)% when the length increases above 100 μm. Most of the failures in conductivity are due to degradation of the platinum/ chromium layer stack during the final plasma cleaning step. The bi-layer hinges survive the capillary folding process, even for extremely small bending radii of 5 μm, nor does the bending have any impact on the conductivity. Stress in the different layers deforms the hinges, which does not affect the conductivity. Once assembled, the conductive hinges can withstand a current density of (1.6 ± 0.4) × 10 6 A/cm 2 . This introduction of conductive electrodes to elastocapillary self-folded silicon-based micro-objects extends the range of their possible applications by allowing an electronic functionality of the folded parts.

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Three-Dimensional Self-Assembled Sensors in Thin-Film SOI Technology

Cited by 29 publications

References 24 publications

Overcurvature describes the buckling and folding of rings from curved origami to foldable tents

Overcurvature describes the buckling and folding of rings from curved origami to foldable tents

Micromachined Thermal Flow Sensors—A Review

Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

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