Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials 2009
DOI: 10.7567/ssdm.2009.p-1-8
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Threshold Voltage (V<sub>th</sub>) Tunability of pMOSFETs with Ternary Hf<sub>x</sub>Mo<sub>y</sub>N<sub>z</sub> Metal Gate and Gd<sub>2</sub>O<sub>3</sub> High-k Gate Dielectric

Hsing-Kan Peng
1
,
Chao Lai
2
,
J. C. Wang
3
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