2012 17th Ieee European Test Symposium (Ets) 2012
DOI: 10.1109/ets.2012.6233037
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Through-Silicon-Via resistive-open defect analysis

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Cited by 10 publications
(3 citation statements)
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“…Moreover, path delays in a 3D-IC already experience variations due to the physical and electrical conditions [3]- [6] such as nonuniform switching, supply noise (such as IR-drop), TSVto-TSV coupling and coupling through the lossy substrate. These conditions tend to affect path delay and may result in incremental signal delay through the path or even cause artificial speed-up or slow-down due to different voltage potentials between driver and receiver gates.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, path delays in a 3D-IC already experience variations due to the physical and electrical conditions [3]- [6] such as nonuniform switching, supply noise (such as IR-drop), TSVto-TSV coupling and coupling through the lossy substrate. These conditions tend to affect path delay and may result in incremental signal delay through the path or even cause artificial speed-up or slow-down due to different voltage potentials between driver and receiver gates.…”
Section: Introductionmentioning
confidence: 99%
“…The main issues regarding the use of TSVs are the large area overhead of TSV pitches, the yield reduction caused by the large number of TSVs, and TSV cost. Moreover, the manufacturing process of TSVs has become a main challenge due to the variability of the manufacturing process [2] [3]. The cost of high yield TSV manufacturing process is only justifiable in presence of a practical solution to counteract TSV related effects (such as voids in TSVs, TSV pinch-off, oxide defects such as pinholes, thermo-mechanical stress, cracks in microbumps, chip warpage, and impurities [4]) which may render the entire chip useless [5].…”
Section: Introductionmentioning
confidence: 99%
“…Τα πιθανά σφάλματα που περιορίζουν την περαιτέρω βελτίωση της τεχνολογίας περιλαμβάνουν τρύπες κενού και σπασίματα στα TSV, κακώς ευθυγραμισμένα ολοκληρωμένα κυκλώματα, αποτυχίες καθαρότητας υλικού, βραχυκύκλωμα προς το υπόστρωμα, αποκόλληση του bump από το ολοκληρωμένο, κ.α. [64][65][66].…”
Section: μοντελοποίηση βλαβών σε διασυνδέσεις διαμέσου πυριτίου (Tsv) 41 εισαγωγήunclassified