Ti diffusion in Ti : LiNbO3 planar and channel optical waveguides

Abstract

Optical mode measurements have been used to determine the anisotropic diffusion coefficient and surface index changes for planar Ti : LiNbO3 waveguides at 0.633 μm. Measured values for the diffusion coefficient at 1000 °C are 𝒟y=9.4×10−13 and 𝒟z=1.4×10−12 cm2/sec. The ratio of the extraordinary to the ordinary surface index change (Δne/Δn0) was found to vary between 1.3 and 1.8, depending on diffusion temperature and Ti film thickness. Ti and Li concentration profiles were measured by secondary-ion mass spectrometry. Additional high concentration peaks, 0.2–0.3 μm wide for both ions, were found superimposed on otherwise well-behaved diffusion profiles. This observation is interpreted to result from a tendency towards Li-Ti-O compound (Li2TiO3 or Li2Ti3O7) formation at the diffusion temperature in a dilute mixture with LiNbO3. Such compound formation has the effect of impeding the Ti diffusion into the LiNbO3 substrate. Electron microprobe measurements were used to measure lateral diffusion from channel waveguides. Under nominally identical conditions, lateral diffusion coefficients varying by as much as a factor of 3 have been observed. The minimum lateral diffusion coefficients observed at 1000 °C were 𝒟y=9.7×10−13 and 𝒟z=1.4×10−12 cm2/sec.

Micro‐structured integrated electro‐optic LiNbO3 modulators

“…Typically the index profile one that comes from titanium indiffusion [33][34][35]. Once optical and RF fields are computed the overlap integral can be calculated by expression 3 and the corresponding V π L product can be derived from Eq.…”

Estudio de las soluciones de los ferroeléctricos LiNbO₃ y LiTaO₃

“…Esto se debe al radio iónico del Eu 3+ , aún así la dirección que sigue la región de solubilidad dentro del diagrama ternario de fases es hacia Eu 2 O 3 , lo cual implica un mecanismo de formación estequiométrico. Resultados de experimentos de luminiscencia (77,78) , por sus interesantes propiedades ópticas y ferroeléctricas (80)(81)(82)(83)(84)(85)(86)(87)(88)(89)(90)(91)(92)(93)(94)(95). La aplicación más interesante para las soluciones sólidas de LiNbO 3 con Ti 4+ es como guía de onda óptica.…”

Diffusion of Zn in stoichiometric LiTaO3

“…Ti-diffused waveguides guide both polarizations but suffer from optical damage in the visible range [5,6]. On the other hand, PE waveguides are more resistant to photorefractive damage but guide the extraordinary polarization only [7,8].…”