Tilted $c$-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

Anderås, Emil; Katardjiev, Ilia; Yantchev, Ventsislav

doi:10.1109/jsen.2012.2199482

Cited by 16 publications

(7 citation statements)

References 5 publications

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“…Aiming at the problem of low sound pressure (several Pa) and the small measuring surface of the experimental model in the acoustic wind tunnel experiment, a microphone In this work, a circular diaphragm combined with four small FBARs and ring mass was proposed for the sensor head to measure pressure less than 100 Pa. Compared with other pressure sensors [13,14], the ring mass structure incorporated into the diaphragm helps create stress concentration regions (SCRs) and reduces the defection of the membrane to improve sensitivity. The stress distribution characteristic for the proposed diaphragm under pressure are studied in detail by FEM analyses, and the output characteristic of the FBAR under pressure is calculated using the first-principle methods.…”

Section: Design and Optimization Of A Microphone Head Structurementioning

confidence: 99%

“…According to the characteristics of low sound pressure (several Pa) and the small measuring surface of the experimental model in the wind tunnel experiment, it is of great significance to develop sensors with smaller volume and higher sensitivity. The film bulk acoustic resonators (FBAR) have been demonstrably promising in pressure sensors [13,14], owing to their extreme sensitivity, miniature sizes which favor easy integration potential with COMS circuits, and easy arraying for multi-channel functioning. The basic configuration of FBAR is a membrane structure consisting of a piezoelectric thin film sandwiched between two electrodes.…”

Section: Introductionmentioning

confidence: 99%

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Design and Optimization of a BAW Microphone Sensor

Guo

Liu

et al. 2022

Micromachines

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A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology. Acoustic measurement is an important part of wind tunnel experiments, and the microphone is the core device in an aerodynamic acoustic measurement system. Aiming at the problem of low sound pressure (several Pa) and the small measuring surface of an experimental model in a wind tunnel experiment, a microphone sensor head with high sensitivity and small volume, based on film bulk acoustic resonator (FBAR), is presented and optimized in this work. The FBARs used as a transducer are located at the edge of a diaphragm for sound pressure level detection. A multi-scale and multi-physical field coupling analysis model of the microphone is established. To improve the performance of the microphone, the structural design parameters of the FBAR and the diaphragm are optimized by simulation. The research results show that the microphone has a small size, good sensitivity, and linearity. The sensor head size is less than 1 mm × 1 mm, the sensitivity is about 400 Hz/Pa when the sensor worked at the first-order resonance frequency, and the linearity is better than 1%.

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Section: Design and Optimization Of A Microphone Head Structurementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and Optimization of a BAW Microphone Sensor

Guo

Liu

et al. 2022

Micromachines

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“…FBARs are widely applied in small phone filters and duplexers. Recently, FBARs have also demonstrated promise in sensor applications such as bio-sensing [ 2 ], mass [ 3 ] and pressure sensors [ 4 ] owing to their miniature size which favors easy integration potential with complementary metal-oxide-semiconductor (COMS) circuits, extreme sensitivity, and easy arraying for multi-channel functioning. The basic configuration of FBARs is a membrane structure consisting of a piezoelectric thin film sandwiched between two electrodes.…”

Section: Introductionmentioning

confidence: 99%

Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements

Guo

Guo²,

Gao

et al. 2017

Sensors

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Film bulk acoustic resonators (FBARs) are widely applied in mass bio-sensing and pressure sensors, owing to their extreme sensitivity and integration ability, and ability to miniaturize circuits. A volatile organic compound (VOC) sensor with a polymer-coated diaphragm, using FBARs as a strain sensing element is proposed and optimized. This vapor sensor is based on organic vapor-induced changes of mechanical deformation of the micro-diaphragm. The four FBARs are located at the edge of the bi-layer diaphragm comprising silicon nitride and silicon oxide for strain extraction. In this work, the strain distribution of the FBAR area under vapor loads is obtained using the finite element analysis (FEA) and the response frequency changes of the FBARs under vapor loads are obtained based on both the first-principle methods to deduce the elastic coefficient variation of aluminum nitride film in FBARs under the bending stresses and the Mason equivalent circuit model of the sensor using ADS software. Finally, optimizations are performed on both the bilayered diaphragm structure and sensing film. The diaphragm with a 0.7 μm silicon nitride layer and a 0.5 μm silicon oxide layer are considered to be the optimized design. The optimal coverage area of the sensing film for the diaphragm is around 0.8.

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“…Hence, for each kind of device and particular use, the response to a given stress has to be individually analysed. Pressure sensors based on film bulk acoustic resonators (FBAR) [2,3], Lamb wave resonators [4], and thin film surface acous-tic wave (SAW) resonators [5,9] have been reported previously. Strain sensors, intended for harsh environments or requiring high response speed (i.e.…”

Section: Introductionmentioning

confidence: 99%

Frequency response of AlN-based solidly mounted resonators under mechanical stress

Clément

Delicado

Olivares

et al. 2017

Sensors and Actuators A: Physical

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We analyse the performance of solidly mounted bulk acoustic wave resonators under induced mechanical stress to explore their viability as strain sensors. The resonators are made of polycrystalline AIN piezoelectric thin films containing uniformly tilted microcrystals to excite both longitudinal and shear modes. The resonators are grown on top of silicon bars that are fixed at one or two edges using two home-made apparatus specifically designed to induce deformations of several hundreds of microstrains. The induced strain causes frequency shifts of tenths of MHz, yielding strain coefficients of the resonant frequency (SCF) up to-71% per unit strain (-0.71 ppm/fie). The influence of the nature of the resonant mode (shear of longitudinal), the electromechanical coupling factor and the operation frequency on the SCF is analysed.

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Tilted $c$-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

Cited by 16 publications

References 5 publications

Design and Optimization of a BAW Microphone Sensor

Design and Optimization of a BAW Microphone Sensor

Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements

Frequency response of AlN-based solidly mounted resonators under mechanical stress

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