“…MEMS (microelectromechanical systems), which are small 40 systems that integrate mechanical and electrical elements to per- 41 form certain functions, have been incorporated in our daily use 42 as sensors, actuators, electronics and micro-structures [1][2][3][4]. The 43 sizes are in the level of micrometers (1-100 lm) for MEMS compo- 44 nents and from 20 to 1000 lm for MEMS devices.…”