Time-Resolved Focused Ion Beam Microscopy: Modeling, Estimation Methods, and Analyses

Prevention Beats Removal: Avoiding Stripe Artifacts from Current Variation in Particle Beam Microscopy Through Time-Resolved Sensing

“…Note that ηQM and ηLQM require no knowledge of beam current λ. We have found ηTRML in most cases outperforms our other estimates when λ is known [6]. In general, when λ is imperfectly known, ηLQM outperforms ηTRML in the low SE yield, high beam current conditions of SEM.…”