Time-resolved radial uniformity of pulse-modulated inductively coupled O2/Ar plasmas*

Liu, Wei; Xue, Chan; Gao, Fei; Liu, Yongxin; Wang, You‐Nian; Zhao, Yao

doi:10.1088/1674-1056/abe3f5

Cited by 1 publication

(1 citation statement)

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“…Tong 等人 [16] 采用混合模型研究了在带有射频偏压源的 Ar/O2/Cl2 ICP 中，射频偏压频率(2.26-27.12 MHz)对其放电特性的影响. 在脉冲调制射频 Ar/O2 ICP 放电中，Xue 等人 [17][18] 采用相分辨发射光谱对射频源功率、脉冲占空比和脉冲频率对等离子体状态参数的影响进行了实验研究；Liu 等人 [19] 讨论了等离子体径向均匀性在脉冲关闭前后的演化. Sun 等人 [20] 模拟了在脉冲调制双频 Ar/O2 ICP 中，外线圈电流和占空比对等离子体均匀性的调制行为.…”

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Numerical simulation of inductively coupled Ar/O2 plasma

Zhang,

Zhao,

Liang

et al. 2024

Acta Phys. Sin.

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In the inductively coupled plasma (ICP) discharge, surface processes, such as reflection, de-excitation, and recombination, can occur when active species arrive at material surfaces, which accordingly influences the plasma properties. In this work, a fluid model is carried out to study the Ar/O2 plasma generated by ICP reactors made of different materials. In simulation, sticking coefficient is employed to estimate the surface reactions on different materials. As the reactor material changes from stainless steel to anodized aluminum to copper, the sticking coefficient of surface reaction O → 1/2O2 decreases. It is found that the reactor material has a great effect on species density. In the stainless steel reactor, the densities of O atoms at grounded and excited states are much lower because more O2 molecules are generated from the surface reaction, and yielding a much higher density of O2+ which is mainly created from the ionization process of O2. Similarly, the high density of O2 also enhances the production of O2(a1△g) molecules by the excitation process, and O- ions via the dissociation attachment reaction. On the contrary, more electrons are consumed via the collisions between electrons and O2 or O2+. Therefore, the electron density obtained in the copper reactor is highest. The densities of Ar+ and Arm also increase with the decreasing sticking coefficients. The densities of O+ and O2+ions peak below the coil in the stainless steel reactor, whereas the radial uniformities are improved in the copper reactor. In the three reactors, the electrons distribute evenly at the reactor center region. The O and O2(a1△g) densities present significant peaks below the coil, while the maxima of Ar+ and Arm densities are below the coil. As for O(1D), the maximum density below the coil region moves toward the reactor center as the reactor material changes from stainless steel to copper. Finally, the effect of sticking coefficient of O → 1/2O2 is studied. The results show that the O density decreases with the sticking coefficient, but the opposite trend is observed in O2 density. It is noticed that the sticking coefficient is found to have little effect on species densities when it is higher than 0.5.

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