2010
DOI: 10.1002/adfm.201001572
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Tin Dioxide Sensing Layer Grown on Tubular Nanostructures by a Non‐Aqueous Atomic Layer Deposition Process

Abstract: A new atomic layer deposition (ALD) process for nanocrystalline tin dioxide films is developed and applied for the coating of nanostructured materials. This approach, which is adapted from non‐hydrolytic sol‐gel chemistry, permits the deposition of SnO2 at temperatures as low as 75 °C. It allows the coating of the inner and outer surface of multiwalled carbon nanotubes with a highly conformal film of controllable thickness. The ALD‐coated tubes are investigated as active components in gas‐sensor devices. Due t… Show more

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Cited by 81 publications
(95 citation statements)
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“…However, due to the low TiO 2 thickness, tunneling effect can overcome this limitation reducing the height of the potential barrier for the conduction at crossing points, whereas CNT cores provide a privileged conduction path. Similar behavior was already observed for sensing layer made of SnO 2 -coated carbon nanotubes [9,15]. The resistance of the hetero-structures is dependent of the oxide thickness, with a maximum for 5.5 nm TiO 2 ( Figure 2b).…”
Section: Resultssupporting
confidence: 82%
See 1 more Smart Citation
“…However, due to the low TiO 2 thickness, tunneling effect can overcome this limitation reducing the height of the potential barrier for the conduction at crossing points, whereas CNT cores provide a privileged conduction path. Similar behavior was already observed for sensing layer made of SnO 2 -coated carbon nanotubes [9,15]. The resistance of the hetero-structures is dependent of the oxide thickness, with a maximum for 5.5 nm TiO 2 ( Figure 2b).…”
Section: Resultssupporting
confidence: 82%
“…Carbon nanotubes (CNTs) appear as an ideal support for such applications due to their intrinsic electrical properties, which can be influenced by the surrounding atmosphere. CNTs have been already employed as support for various metal oxide sensing layer [8][9][10][11][12][13][14] and a recent paper described a general sensing mechanism for SnO 2 -carbon heterostructures [15].…”
mentioning
confidence: 99%
“…For this purpose, nanostructures consisting of carbon nanotubes coated by atomic layer deposition (ALD) with tin dioxide 9 were synthesized. Various metal oxide morphologies were obtained in a controlled manner by tailoring the CNT surface functionalization.…”
Section: Introductionmentioning
confidence: 99%
“…A fine control of the morphology and thickness of the deposited films can be achieved by this technique [2]. In view of gas sensors applications, great interest is devoted on SnO2, TiO2, ZnO semiconductor layers with a thickness in the order of the Debye length [3][4][5]. Previously it was shown that the tailoring of the type and degree of functionalization of the CNTs surface allows to tune the ZnO coating from selectively decorated up to fully coated CNTs [6].…”
Section: Introductionmentioning
confidence: 99%