2009
DOI: 10.1016/j.apsusc.2008.06.206
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Titanium oxide nanostructured films by reactive pulsed laser deposition

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Cited by 31 publications
(25 citation statements)
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“…However a few works about the plume dynamics has been done [8][9][10]. Our findings join the previous results on the effect of the plume dynamics on the properties of the deposited film [11][12][13][14][15][16][17][18]. Among those properties, the films morphology was related to one of the most important plume parameter which is the plume stopping distance (R st ) [13,14,16,17].…”
Section: Introductionsupporting
confidence: 90%
See 1 more Smart Citation
“…However a few works about the plume dynamics has been done [8][9][10]. Our findings join the previous results on the effect of the plume dynamics on the properties of the deposited film [11][12][13][14][15][16][17][18]. Among those properties, the films morphology was related to one of the most important plume parameter which is the plume stopping distance (R st ) [13,14,16,17].…”
Section: Introductionsupporting
confidence: 90%
“…These clusters are very apparent on the deposited layer at 8 cm where their size is of the order of 50 nm. This type of microstructure is recognized as the result of an agglomeration of ablated species in the gas phase before they are deposited on the substrate [39,14,16]. This agglomeration occurs when the concentration and transit time of plasma species are sufficient and when their energy is completely dissipated [39,40].…”
Section: Resultsmentioning
confidence: 98%
“…It is clear that further increasing laser fluence or decreasing the target-substrate distance, smooth and dense layers can be achieved. We note that several authors [28][29][30][31] have already reported the porous structure of films deposited at distances beyond the plasma plume stopping distance.…”
Section: Film Depositionmentioning
confidence: 95%
“…Titanium dioxide in nature exists in one of three crystalline forms, anatase, rutile and brookite, and in thin film form, its structure is known to be highly sensitive to deposition conditions. Rutile is the thermodynamically stable form of titania; anatase is transformed to rutile at high deposition or post-annealing temperatures (in most cases above 700 °C) [7][8][9][10][11][12][13][14]. Brookite is very rarely found in thin film form.…”
Section: Introductionmentioning
confidence: 99%