“…Various EUV imaging methods have been used previously, most particularly pinhole cameras 3,4,6,7 and diode arrays. 1,2,5 Pinhole cameras consist of a small pinhole to form an image, a micro-channel plate intensifier shutter that converts EUV into fast electrons, a scintillator/phosphor to convert the fast electrons into a visible light image, and a visible light camera to record the phosphor image. Pinhole cameras have the advantage of simplicity, but have extremely low sensitivity because of the necessarily small pinhole photon collection efficiency.…”