Top-Down Fabrication of Sub-30 nm Monocrystalline Silicon Nanowires Using Conventional Microfabrication

Chen, Songyue; Bomer, Johan G.; Wiel, Wilfred G. van der; Carlen, Edwin T.; Berg, Albert van den

doi:10.1021/nn901220g

Cited by 88 publications

(106 citation statements)

References 36 publications

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“…ver the past decade, silicon nanowires have been widely researched for application as biochemical sensors [1]- [12]. Silicon nanowires are of interest for a number of reasons, for example a high surface-to-volume ratio gives high sensitivity and electrical sensing gives real-time, label-free detection without the use of expensive optical components.…”

Section: Introductionmentioning

confidence: 99%

“…Low-cost manufacture is critically important for nanowire biosensor applications because for widespread uptake of biosensors in Point of Care settings, the biosensor needs to be disposable and hence very cheap. Several groups [10]- [12] have researched top-down approaches that do not need advanced lithography by using coarser lithography and specialist wet etches to reduce the nanowire diameter. However, these approaches still use expensive SOI wafers and have the disadvantage that wet etches are generally not favored for manufacturing.…”

Section: Introductionmentioning

confidence: 99%

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Three-Mask Polysilicon Thin-Film Transistor Biosensor

Zeimpekis

Lombardini

Ditshego

et al. 2014

IEEE Trans. Electron Devices

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Abstract-Biosensors are commonly produced using an SOI CMOS process and advanced lithography to define nanowires. In this work, a simpler and cheaper junctionless 3-mask process is investigated, which uses thin film technology to avoid the use of SOI wafers, in-situ doping to avoid the need for ion implantation and direct contact to a low doped polysilicon film to eliminate the requirement for heavily doped source/drain contacts. Furthermore, TiN is used to contact the biosensor source/drain because it is a hard, resilient material that allows the biosensor chip to be directly connected to a printed circuit board without wire bonding. pH sensing experiments, combined with device modelling, are used to investigate the effects of contact and series resistance on the biosensor performance, as this is a key issue when contacting directly to low doped silicon. It is shown that in-situ phosphorus doping concentrations in the range 4×10

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Three-Mask Polysilicon Thin-Film Transistor Biosensor

Zeimpekis

Lombardini

Ditshego

et al. 2014

IEEE Trans. Electron Devices

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“…All steps have been demonstrated with proof-of-principle experiments, and this shows the capability and versatility of our PaSCAl platform. The electrical lysis and extraction of the cell content using an EOF are currently optimized, and this will be combined with actual analysis of biomolecules from the cell using, e.g., integrated nanostructures in the side channels such as silicon nanowires [38] that provide the required sensitivity for single molecule detection and analysis.…”

Section: Discussionmentioning

confidence: 99%

Parallel single‐cell analysis microfluidic platform

et al. 2011

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We report a PDMS microfluidic platform for parallel single-cell analysis (PaSCAl) as a powerful tool to decipher the heterogeneity found in cell populations. Cells are trapped individually in dedicated pockets, and thereafter, a number of invasive or non-invasive analysis schemes are performed. First, we report single-cell trapping in a fast (2-5 min) and reproducible manner with a single-cell capture yield of 85% using two cell lines (P3x63Ag8 and MCF-7), employing a protocol which is scalable and easily amenable to automation. Following this, a mixed population of P3x63Ag8 and MCF-7 cells is stained in situ using the nucleic acid probe (Hoechst) and a phycoerythrin-labeled monoclonal antibody directed at EpCAM present on the surface of the breast cancer cells MCF-7 and absent on the myeloma cells P3x63Ag8 to illustrate the potential of the device to analyze cell population heterogeneity. Next, cells are porated in situ using chemicals in a reversible (digitonin) or irreversible way (lithium dodecyl sulfate). This is visualized by the transportation of fluorescent dyes through the membrane (propidium iodide and calcein). Finally, an electrical protocol is developed for combined cell permeabilization and electroosmotic flow (EOF)-based extraction of the cell content. It is validated here using calcein-loaded cells and visualized through the progressive recovery of calcein in the side channels, indicating successful retrieval of individual cell content.

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“…Boron activation inside Si was carried out directly after the implantations step through an annealing process. SiNWs were then defined by plane-dependent wet etching (PDE) [8]. The most important steps for PDE definition of SiNWs are depicted in Fig.…”

Section: Experimental Apparatusmentioning

confidence: 99%

SiNW-FET in-Air Biosensors for High Sensitive and Specific Detection in Breast Tumor Extract

et al. 2016

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Abstract-The sensitive analysis of proteins is central to disease diagnosis. The detection and investigation of angiogenic and inflammatory ligands in the tumor tissue can further improve the level of knowledge of the cancer disease by capturing the heterogeneity and the complexity of the tumor microenvironment. In previous works we demonstrated that high quality Silicon Nanowire Field Effect Transistors (SiNW-FETs) can be used to sense very low concentration (fM) of pathogenic factors in controlled Phosphate Buffered Saline (PBS). In this work, we show SiNW-FETs as biosensors for the detection of cancer markers in tumor extracts, as proof of our technology to successfully work on real patients' sample. In particular, we achieved the detection of exogenously added rabbit antigen in a much more complex environment, i.e. a human breast tumor extract. Our results show specific and high sensitive antigen detection with p-type SiNWFETs in the femto-molar range. Further and most importantly, the wires sense rabbit antigen molecules in the presence of a 100.000 mass excess of non-specific protein, indicating that the sensor is extremely resistant to noise.

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Top-Down Fabrication of Sub-30 nm Monocrystalline Silicon Nanowires Using Conventional Microfabrication

Cited by 88 publications

References 36 publications

Three-Mask Polysilicon Thin-Film Transistor Biosensor

Three-Mask Polysilicon Thin-Film Transistor Biosensor

Parallel single‐cell analysis microfluidic platform

SiNW-FET in-Air Biosensors for High Sensitive and Specific Detection in Breast Tumor Extract

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