Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Vidal-Álvarez, Gabriel; Agustı́, Jordi; Torres, F.; Abadal, G.; Barniol, N.; Llobet, Jordi; Sansa, Marc; Fernández-Regúlez, Marta; Pérez‐Murano, F.; Paulo, Álvaro San; Gottlieb, O.

doi:10.1088/0957-4484/26/14/145502

Cited by 19 publications

(13 citation statements)

References 37 publications

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“…Since for closely matched frequencies k eff is mainly dominated by the smaller subsystem, a decrease of its stiffness will lead to an increase in sensitivity. Hence, possible sensor implementations could include the use of single walled carbon nanotubes as smaller oscillator or fabrication of the complete sensor in silicon technology, allowing for production of double cantilever structures with one nanocantilever [ 13 , 18 ].…”

Section: Resultsmentioning

confidence: 99%

Signal enhancement in cantilever magnetometry based on a co-resonantly coupled sensor

Körner

Reiche

Gemming

et al. 2016

Beilstein J. Nanotechnol.

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SummaryCantilever magnetometry is a measurement technique used to study magnetic nanoparticles. With decreasing sample size, the signal strength is significantly reduced, requiring advances of the technique. Ultrathin and slender cantilevers can address this challenge but lead to increased complexity of detection. We present an approach based on the co-resonant coupling of a micro- and a nanometer-sized cantilever. Via matching of the resonance frequencies of the two subsystems we induce a strong interplay between the oscillations of the two cantilevers, allowing for a detection of interactions between the sensitive nanocantilever and external influences in the amplitude response curve of the microcantilever. In our magnetometry experiment we used an iron-filled carbon nanotube acting simultaneously as nanocantilever and magnetic sample. Measurements revealed an enhancement of the commonly used frequency shift signal by five orders of magnitude compared to conventional cantilever magnetometry experiments with similar nanomagnets. With this experiment we do not only demonstrate the functionality of our sensor design but also its potential for very sensitive magnetometry measurements while maintaining a facile oscillation detection with a conventional microcantilever setup.

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Section: Resultsmentioning

confidence: 99%

Signal enhancement in cantilever magnetometry based on a co-resonantly coupled sensor

Körner

Reiche

Gemming

et al. 2016

Beilstein J. Nanotechnol.

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“…Here, we actually take advantage of the overhang formation to generate coupled mechanical resonator systems based on a pair of doubly clamped SiNWs and demonstrate their coupled mechanical behaviour. Coupling of suspended SiNWs has already proven suitable for the realization of ultrasensitive nanomechanical mass sensors [17,42]. In that work [42], optical lithography methods were used.…”

Section: Coupled Operation Of Suspended Silicon Nanowiresmentioning

confidence: 99%

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

Llobet¹,

Rius²,

Chuquitarqui³

et al. 2018

Nanotechnology

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We present the fabrication, operation, and CMOS integration of arrays of suspended silicon nanowires (SiNWs). The functional structures are obtained by a top-down fabrication approach consisting in a resistless process based on focused ion beam irradiation, causing local gallium implantation and silicon amorphization, plus selective silicon etching by tetramethylammonium hydroxide, and a thermal annealing process in a boron rich atmosphere. The last step enables the electrical functionality of the irradiated material. Doubly clamped silicon beams are fabricated by this method. The electrical readout of their mechanical response can be addressed by a frequency down-mixing detection technique thanks to an enhanced piezoresistive transduction mechanism. Three specific aspects are discussed: (i) the engineering of mechanically coupled SiNWs, by making use of the nanometer scale overhang that it is inherently-generated with this fabrication process, (ii) the statistical distribution of patterned lateral dimensions when fabricating large arrays of identical devices, and (iii) the compatibility of the patterning methodology with CMOS circuits. Our results suggest that the application of this method to the integration of large arrays of suspended SiNWs with CMOS circuitry is interesting in view of applications such as advanced radio frequency band pass filters and ultra-high-sensitivity mass sensors.

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“…Micro/nanoelectromechanical system (M/NEMS) resonators have been widely used as mass sensors in the “More-than-Moore” paradigm because of their enhanced mass sensitivity as a result of their miniaturization down to the nanoscale level [ 1 ]. The operation principle relies on the gravimetric sensing provided by a resonant frequency down-shifting when loaded with a mass.…”

Section: Introductionmentioning

confidence: 99%

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Perelló-Roig

Verd

Bota

et al. 2020

Sensors

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Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator clamp shape with a corresponding non-negligible impact on the gravimetric sensor resolution. Results indicate that such an effect must be accounted when designing MEMS resonators with potential applications in the detection of volatile organic compounds (VOCs). In addition, the impact of thermal perturbations was also investigated. Two types of four-anchored CMOS-MEMS plate resonators were designed and fabricated: one with straight anchors, while the other was sustained through folded flexure clamps. The mechanical structures were monolithically integrated together with an embedded readout amplifier to operate as a self-sustained fully integrated oscillator on a commercial CMOS technology, featuring low-cost batch production and easy integration. The folded flexure anchor resonator provided a flow impact reduction of 5× compared to the straight anchor resonator, while the temperature sensitivity was enhanced to −115 ppm/°C, an outstanding result compared to the −2403 ppm/°C measured for the straight anchored structure.

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Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Cited by 19 publications

References 37 publications

Signal enhancement in cantilever magnetometry based on a co-resonantly coupled sensor

Signal enhancement in cantilever magnetometry based on a co-resonantly coupled sensor

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

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