1998
DOI: 10.1063/1.1149084
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Torsion cantilever as magnetic torque sensor

Abstract: High sensitivity magnetic head for a shaft torque sensorA macroscopic cantilever for capacitive torque magnetometry has been developed and tested. It is based on torsion arms in order to obtain better damping against external vibrations than with ordinary cantilevers of similar size but anchored on one side. Microfabricated out of silicon-on-insulator wafers by deep reactive ion etching, the sensor consists of a long ͑14 mm͒ and thin ͑40 m͒ cantilever with two capacitive plates, anchored at its center to a rig… Show more

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Cited by 36 publications
(11 citation statements)
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“…The torque sensor with a sample mounted on it is inserted into the cryostat and connected to a Lock-In Amplifier (LIA) for read out. Details of the measurement principle are beyond the scope of this article and are described elsewhere 3,4 . All devices needed to control and measure the system's state are connected to a Windows PC via an IEEE-488 General Purpose Interface Bus (GPIB), RS-232 serial connections and indirectly via additional analog and digital input and output ports present in the LIA instrument.…”
Section: Methodsmentioning
confidence: 99%
“…The torque sensor with a sample mounted on it is inserted into the cryostat and connected to a Lock-In Amplifier (LIA) for read out. Details of the measurement principle are beyond the scope of this article and are described elsewhere 3,4 . All devices needed to control and measure the system's state are connected to a Windows PC via an IEEE-488 General Purpose Interface Bus (GPIB), RS-232 serial connections and indirectly via additional analog and digital input and output ports present in the LIA instrument.…”
Section: Methodsmentioning
confidence: 99%
“…The combination of a cantilever with a magnetic tip allowed even the detection of a single spin [76]. In this review, we will instead focus on capacitive detection: a capacitive (electrical) detection of the deflection of the upper plate of a capacitor (the cantilever) requires an extremely simple and relatively inexpensive experimental set-up, but at the same time assures high sensitivity and fast data acquiring time [77,78].…”
Section: Experimental Set-upmentioning
confidence: 99%
“…[1][2][3] The last of these offer high sensitivity and are mostly employed for the study of single crystals or thin films. [4][5][6][7] Torque magnetometry is an important tool in today's condensed matter physics, in particular, in the field of nanomagnetic materials, superconductors, topological insulators, and heavy fermion systems.…”
Section: Introductionmentioning
confidence: 99%