2015
DOI: 10.1016/j.tsf.2015.02.003
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Toward the understanding of annealing effects on (GaIn)2O3 films

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Cited by 15 publications
(14 citation statements)
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“…Since the test method adopted is grazing incidence, there is no obvious substrate signal caught in the result with a diffraction peak observed. This peak corresponds to Ga 2 O 3 (4̅ 02) with a monoclinic structure, 29,30 indicating that the film has good crystallinity, which is not owned by the two films mentioned later. To observe the thickness and surface morphology of the film, we used SEM and AFM to characterize it.…”
Section: ■ Results and Discussionmentioning
confidence: 94%
“…Since the test method adopted is grazing incidence, there is no obvious substrate signal caught in the result with a diffraction peak observed. This peak corresponds to Ga 2 O 3 (4̅ 02) with a monoclinic structure, 29,30 indicating that the film has good crystallinity, which is not owned by the two films mentioned later. To observe the thickness and surface morphology of the film, we used SEM and AFM to characterize it.…”
Section: ■ Results and Discussionmentioning
confidence: 94%
“…Similar thickness reduction has also been observed due to annealing in the case of indium gallium oxide. [ 35 ] The XRD pattern from the as‐grown and annealed samples was identical, indicating that no measurable change in the crystal structure of the film occurred during the vacuum anneal. Figure 10 includes the comparative spectral responsivity measurements from detectors fabricated from both samples.…”
Section: Resultsmentioning
confidence: 99%
“…From Figure 9 c, it can be seen that O 1s peaks are fitted with two components, as oxygen vacancies often introduce an additional component to the lattice oxygen. 59 The O 1s peaks are characterized as a superposition of two nearby peaks that are located at 529.27 and 531.1 eV and denoted by “O 1 ” and “O 2 ”, respectively. The presence of a dual O 1s peak is very common for oxide materials that contain cations in the multiple valence states.…”
Section: Results and Discussionmentioning
confidence: 99%
“… 60 Therefore, the O 1 peak corresponds to the lattice oxygen, and the O 2 peak can be assigned to the oxygen vacancies. 61 We calculated the percentage of O 1 and O 2 by integrating the intensity of the O 2 peak relative to the total peak intensity and estimated the value to be 36% for O 2 and 64% for O 1 . Hence, a detailed analysis of the XPS data demonstrated the oxidation values of Fe and O to suggest the presence of Fe-based impurities along with abundant oxygen vacancies at room temperature.…”
Section: Results and Discussionmentioning
confidence: 99%