2012
DOI: 10.1016/j.bios.2012.04.022
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Towards a biosensor based on anti resonant reflecting optical waveguide fabricated from porous silicon

Abstract: Recently, we demonstrated that Anti Resonant Reflecting Optical Waveguide (ARROW) based on porous silicon (PS) material can be used as a transducer for the development of a new optical biosensor. Compared to a conventional biosensor waveguide based on evanescent waves, the ARROW structure is designed to allow a better overlap between the propagated optical field and the molecules infiltrated in the porous core layer and so to provide better molecular interactions sensitivity.The aim of this work is to investig… Show more

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Cited by 26 publications
(13 citation statements)
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“…Recently, we have demonstrated the feasibility of a planar AntiResonant Reflecting Optical Waveguide (ARROW) based on porous silicon for detection purposes even if the refractive index contrast is rather low 15,16 compared to other materials. 17,18 The particular characteristic of this antiresonant waveguide is that the upper porous layer performs both the role of active and guiding layer supporting field propagation which ensures a more sensitive interaction between the propagated light and the infiltrated biological species.…”
Section: 14mentioning
confidence: 99%
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“…Recently, we have demonstrated the feasibility of a planar AntiResonant Reflecting Optical Waveguide (ARROW) based on porous silicon for detection purposes even if the refractive index contrast is rather low 15,16 compared to other materials. 17,18 The particular characteristic of this antiresonant waveguide is that the upper porous layer performs both the role of active and guiding layer supporting field propagation which ensures a more sensitive interaction between the propagated light and the infiltrated biological species.…”
Section: 14mentioning
confidence: 99%
“…After photolithography step, an electrochemical anodization process was performed through the mask apertures to create three distinct porous silicon layers with porosities and thicknesses satisfying the antiresonance conditions 21 to obtain the ARROW structures. 15,16 For this anodization process, we used an electrolyte composed of HF (50 %), ethanol and deionised water (at 18 M1) solution with ratios of 2-2-1 respectively. We applied successive current densities of 65, 2 and 19 mA.cm -2 respectively for the layers.…”
Section: 14mentioning
confidence: 99%
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“…This improves low detection limit against other materials and high sensitivity could be obtained. Therefore, PS has been also used for transduction of recognition events into measurable optical signals using highly sensitive photonic structure, such as Bragg mirrors, optical waveguides, microcavities, and so on [5][6][7][8]. The most widely used PS-based photonic designs are due to the ease of preparation by periodically altering the etching time and etching current.…”
Section: Introductionmentioning
confidence: 99%
“…FESEM cross-sectional image of Au/PSM substrate and PSM structure following the (LH) 6 L c (HL)6 sequence.…”
mentioning
confidence: 99%