2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and 2022
DOI: 10.1109/eurosime54907.2022.9758881
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Towards predictive system-level modelling of miniaturized photoacoustic gas sensors

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Cited by 6 publications
(3 citation statements)
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“…Non-resonant miniaturized photoacoustic gas sensors (PAS) comprise a light source that often consists of a MEMS infrared emitter and an optical filter, a pressure chamber and a MEMS microphone [1]. Infrared Radiation is emitted and filtered in a way that the photons entering the pressure chamber match the wavelength needed to excite the gas molecules of interest.…”
Section: Background and State Of The Artmentioning
confidence: 99%
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“…Non-resonant miniaturized photoacoustic gas sensors (PAS) comprise a light source that often consists of a MEMS infrared emitter and an optical filter, a pressure chamber and a MEMS microphone [1]. Infrared Radiation is emitted and filtered in a way that the photons entering the pressure chamber match the wavelength needed to excite the gas molecules of interest.…”
Section: Background and State Of The Artmentioning
confidence: 99%
“…One major goal in sensor development is hence to provide maximum sensitivity to CO2 while, at the same time, preserving robustness against changing environmental conditions such as humidity. A common signal analysis approach in this respect is to bandpass the microphone signal at the excitation frequency and calculate the root mean square (RMS) for every acoustical pulse, which is a measure for the gas concentration inside the pressure chamber and hence, the sensor's sensitivity [1,4]. Our approach addresses the increase of this sensitivity w.r.t to the state of the art.…”
Section: Background and State Of The Artmentioning
confidence: 99%
“…A study by [58] reported that the photoacoustic method can detect ammonia concentrations in the range of 0.1 to 20 ppm in laboratory conditions, with high sensitivity and accuracy. Furthermore, a study by [59] found that the photo-acoustic method could detect ammonia in less than 5 s with a detection limit of 2 ppm. These findings suggest that photoacoustic spectroscopy can be an effective and efficient technique for the detection of ammonia in various environments.…”
mentioning
confidence: 99%