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the netherlands), are experimentally characterized. Their behaviour is compared against simulations performed in anSYS Workbench™, confirming good accuracy of the predictive method. Furthermore, the electromechanical multiphysical behaviour of the Flc eh is also analysed in Workbench, by adding a layer with piezoelectric conversion properties in the simulation. The measured and simulated data reported in this paper confirm that the MeMS converter exhibits multiple resonant modes in the frequency range below 1 khz, where most of the environmental vibration energy is scattered, and extracted power levels of 0.2 μW can be achieved as well, in closed-loop conditions. Further developments of this work are expected to fully prove the high-performance of the Flc concept, and are going to be addressed by the authors of this work in the on-going activities.

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Three different state-of-the-art approaches are used to generate macromodels of an electrostatically actuated and viscously damped ohmic contact RF-MEMS switch. The capability of the three multi-energy domain coupled models to predict the behavior of the RF-MEMS switch is evaluated w.r.t. white light interferometer and laser vibrometer measurements. The different macromodels show very good agreement concerning the quasi-static measured pull-in/pull-out characteristics. The evaluation of the modeled viscous damping forces demonstrates that tailored physics-based models give significantly better results than simple generic models. However, all approaches fail in capturing the landing phase of the membrane during the dynamic pull-in correctly. Measurements revealed that this is due to the presence of a higher eigenmode that is activated during impact.