Towards soft x-ray fluorescence measurements in the laboratory using a laser-produced plasma source and a complementary metal-oxide semiconductor detector

Staeck, Steffen; Kayser, Yves; Baumann, J.; Jonas, Adrian; Mantouvalou, Ioanna; Hartmann, R.; Kanngießer, Birgit; Stiel, H.

doi:10.1088/1748-0221/16/03/p03033

Cited by 3 publications

(5 citation statements)

References 43 publications

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“…It has been shown that these sensors dramatically increase the full-frame acquisition speed (48 Hz for the standard gain and 24 Hz for the HDR mode) compared to the commercial Back-Side-Illuminated Charge-Coupled Device (CCD-BSI) routinely used at soft X-ray facilities. The first utilization of this device opened up perspectives for soft X-ray ptychography (Mille et al, 2022), soft X-ray scattering techniques (Desjardins et al, 2020;Marras et al, 2021) and other applications, such as soft X-ray fluorescence (Staeck et al, 2021). Another obvious application concerns the implementation of such a class of detectors at ultra-short X-ray sources (laser-based X-ray source or free-electron laser), where the low frame rate of the standard commercially available CCD-BSI (see, for example, Vodungbo et al, 2012;Wang et al, 2012) limits the time of data collection.…”

Section: Introductionmentioning

confidence: 99%

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Léveillé¹,

Desjardins²,

Popescu³

et al. 2022

J Synchrotron Radiat

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The latest Complementary Metal Oxide Semiconductor (CMOS) 2D sensors now rival the performance of state-of-the-art photon detectors for optical application, combining a high-frame-rate speed with a wide dynamic range. While the advent of high-repetition-rate hard X-ray free-electron lasers (FELs) has boosted the development of complex large-area fast CCD detectors in the extreme ultraviolet (EUV) and soft X-ray domains, scientists lacked such high-performance 2D detectors, principally due to the very poor efficiency limited by the sensor processing. Recently, a new generation of large back-side-illuminated scientific CMOS sensors (CMOS-BSI) has been developed and commercialized. One of these cost-efficient and competitive sensors, the GSENSE400BSI, has been implemented and characterized, and the proof of concept has been carried out at a synchrotron or laser-based X-ray source. In this article, we explore the feasibility of single-shot ultra-fast experiments at FEL sources operating in the EUV/soft X-ray regime with an AXIS-SXR camera equipped with the GSENSE400BSI-TVISB sensor. We illustrate the detector capabilities by performing a soft X-ray magnetic scattering experiment at the DiProi end-station of the FERMI FEL. These measurements show the possibility of integrating this camera for collecting single-shot images at the 50 Hz operation mode of FERMI with a cropped image size of 700 × 700 pixels. The efficiency of the sensor at a working photon energy of 58 eV and the linearity over the large FEL intensity have been verified. Moreover, on-the-fly time-resolved single-shot X-ray resonant magnetic scattering imaging from prototype Co/Pt multilayer films has been carried out with a time collection gain of 30 compared to the classical start-and-stop acquisition method performed with the conventional CCD-BSI detector available at the end-station.

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Section: Introductionmentioning

confidence: 99%

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Léveillé¹,

Desjardins²,

Popescu³

et al. 2022

J Synchrotron Radiat

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“…Since this X-ray tube is commercially available, it is easy to utilize in a purpose-built setup. The currently used Tucsen Dhyana 95 detector also leaves some room for improvement regarding the quantum efficiency below 1 keV [ 25 ]. Newer models with improved quantum efficiency could help reduce the measurement time even further [ 24 , 35 ].…”

Section: Discussionmentioning

confidence: 99%

“…The beamline uses a plane grating mirror monochromator and the beam size is 1 mm × 1 mm. The detector used is a Tucsen Dhyana 95 CMOS detector [ 25 ]. This detector was adapted for the use in the soft X-ray range [ 27 ].…”

Section: Methodsmentioning

confidence: 99%

“…For the GEXRF measurements, the sample is aligned at 90° excitation angle and 0° emission angle towards the detector. The low readout noise of the CMOS detector enables sufficient energy resolution in the soft X-ray range below 1 keV by means of single-photon event evaluation [ 25 , 28 ]. The total measurement time is significantly reduced compared to using a conventional CCD by virtually omitting the readout time.…”

Section: Methodsmentioning

confidence: 99%

“…In this work, the feasibility of the method in the soft X-ray range is demonstrated in proof-of-concept measurements at the BESSY II synchrotron radiation facility, as well as in the laboratory. The superior energy resolution of the CMOS detector compared to common CCD detectors makes SF-GEXRF applicable in the soft X-ray range to investigate lighter elements such as

and

[ 23 , 24 , 25 ]. First, the results of SF-GEXRF measurements of a

grating at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility are presented.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

et al. 2022

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Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tender X-ray range. However, lighter elements such as oxygen, nitrogen or carbon cannot be efficiently investigated in this energy range, because of the ineffective excitation. Moreover, common CCD detectors are not able to discriminate between fluorescence lines below 1 keV. Oxygen and nitrogen are important components of insulation and passivation layers, for example, in silicon oxide or silicon nitride. In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The sample investigated is a Si3N4 lamellar grating, which represents 2D periodic nanostructures as used in the semiconductor industry. The emerging two-dimensional fluorescence patterns are recorded with a CMOS detector. To this end, energy-dispersive spectra are obtained via single-photon event evaluation. In this way, spatial and therefore angular information is obtained, while discrimination between different photon energies is enabled. The results are compared to calculations of the sample model performed by a Maxwell solver based on the finite-elements method. A first measurement is carried out at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility to demonstrate the feasibility of the method in the soft X-ray range. Furthermore, a laser-produced plasma source (LPP) is utilized to investigate the feasibility of this technique in the laboratory. The results from the BESSY II measurements are in good agreement with the simulations and prove the applicability of scan-free GEXRF in the soft X-ray range for quality control and process engineering of 2D nanostructures. The LPP results illustrate the chances and challenges concerning a transfer of the methodology to the laboratory.

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Investigation of Ti nanostructures via laboratory scanning-free GEXRF

Staeck,

Baumann,

Hönicke

et al. 2025

Nanoscale

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Towards soft x-ray fluorescence measurements in the laboratory using a laser-produced plasma source and a complementary metal-oxide semiconductor detector

Cited by 3 publications

References 43 publications

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Single-shot experiments at the soft X-FEL FERMI using a back-side-illuminated scientific CMOS detector

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Investigation of Ti nanostructures via laboratory scanning-free GEXRF

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