Toxicity of Silicon Compounds in Semiconductor Industries

Nakashima, Hiroshi; Omae, Kazuyuki; Takebayashi, Toru; Ishizuka, Chizuru; Uemura, Takashi

doi:10.1539/joh.40.270

Cited by 46 publications

(24 citation statements)

References 7 publications

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“…However, the use of these commercial precursors as a source of silica is impractical since the price of these chemicals is expensive and it is harmful to health and environment [6,7]. Thus, finding a new source of silica that is cheaper, safer, and environmentally friendly is crucial [4,7].…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Potassium Silicate Nanoparticles from Rice Straw Ash Using a Flame-assisted Spray-pyrolysis Method

Nandiyanto

Permatasari

Sucahya

et al. 2017

IOP Conf. Ser.: Mater. Sci. Eng.

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Abstract. The purpose of this study was to synthesize potassium silicate nanoparticles from rice straw ash using a flame-assisted spray-pyrolysis method. Rice straw, as one of the agricultural wastes, was used as a source of silica. In the experimental procedure, rice straw was burned at 700°C for 3 hours to produce rice straw ash. Then, the rice straw ash was extracted using an alkaline method. We used potassium hydroxide (KOH) as an alkaline chemical agent as well as a source of potassium. The solution was then put into the flame-assisted spray-pyrolysis apparatus to produce potassium silicate nanoparticles. The results showed that the spray method can assist the production of spherical potassium silicate nanoparticles with sizes of about 50 nm.

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Section: Introductionmentioning

confidence: 99%

Synthesis of Potassium Silicate Nanoparticles from Rice Straw Ash Using a Flame-assisted Spray-pyrolysis Method

Nandiyanto

Permatasari

Sucahya

et al. 2017

IOP Conf. Ser.: Mater. Sci. Eng.

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“…Nakashima et al reported that acute exposure can cause death TEOS. (Nakashima et al, 1998) Thus, there is a need to find a silica precursor safer, cheaper, and more environmentally friendly. .…”

Section: Introductionmentioning

confidence: 99%

Review: Agricultural Wastes as a Source of Silica Material

Permatasari

Sucahya

Nandiyanto

2016

IJOST

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Silica is the most abundant components in the earth's crust and is made by way of synthesis for use in the application of technology. Silica are generally found commercially as alkoxysilane compounds (i.e such as tetraethylorthosilicate (TEOS), sodium silicate, and tetramethylorthosilicat). However, these compounds can have a negative impact on health. Thus, further approaches to find the source of silica that is safer, cheaper, and more environmentally friendly is inevitable. However, not all summary journals are thoroughly discussed the silica sources. Further, method of isolation and application of the silica from agricultural waste is limited. This paper reported studied several sources of silica derived from agricultural waste, such as rice husk, rice straw, corn cobs, and bagasse. In addition, this paper discussed also about the method of isolation of silica from agricultural waste, and its application as a catalyst.

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“…In this method, silicone oil has been used as starting materials used to deposit SiO 2 films. It is a promising materials because of their low cost, high thermal stability and high safety [29,30], compared with tetra-ethyl-ortho-silicate [TEOS:Si(OC 2 H 5 ) 4 ] [31,32], a widely used as a common source materials to deposit SiO 2 films. TEOS is also toxic to human eyes and throats.…”

Section: Introductionmentioning

confidence: 99%

Study of the Influence of Temperature on the Deposition of SiO<sub>2</sub> Films from Reaction of Silicone Oil Vapor and Ozone Gas

Rajib

Horita

Rahman

et al. 2016

Rajshahi Univ. j. sci. eng.

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This work reports the influence of deposition temperature on the deposition of SiO 2 films on silicon substrate by using chemical reaction of silicone oil vapor andozone gas at low temperature. An organic solution as a catalyst at atmospheric pressure has been used to enhance the deposition rate of SiO 2 . The deposition rate of SiO 2 films was found to vary with the variation of the concentration of the catalyst and deposition temperature (160°C ~ 260°C). The deposited SiO 2 films were confirmed by Fourier transform infrared (FT-IR) spectroscopy. The thickness and refractive index of the as-deposited films were measured by the laser ellipsometry. FT-IR spectra of the as-deposited films were very much similar to those of SiO 2 films found in literature. The deposition temperature was found to influence the deposition rate of SiO 2 strongly. The maximum deposition rate was found to 17.2 nm per minute for the case of 220°C. The deposition temperature also influenced the refractive index of the films. Experimental results showed that thedeposition temperature could be a major parameter for the enhancement of the deposition rate.

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Toxicity of Silicon Compounds in Semiconductor Industries

Abstract: Abstract:Toxicity of Silicon Compounds in Semiconductor Industries: Hiroshi NAKASHIMA, et al.

Cited by 46 publications

References 7 publications

Synthesis of Potassium Silicate Nanoparticles from Rice Straw Ash Using a Flame-assisted Spray-pyrolysis Method

Synthesis of Potassium Silicate Nanoparticles from Rice Straw Ash Using a Flame-assisted Spray-pyrolysis Method

Review: Agricultural Wastes as a Source of Silica Material

Study of the Influence of Temperature on the Deposition of SiO<sub>2</sub> Films from Reaction of Silicone Oil Vapor and Ozone Gas

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