Tracking and Shape Control of a Micro-cantilever using Electrostatic Actuation

Karami, Farzad; Salarieh, Hassan; Shabani, Rasoul

doi:10.5829/idosi.ije.2014.27.09c.14

Cited by 3 publications

(2 citation statements)

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“…Gharib et al (2021) investigated the capability of PID controller for path tracking of micro-positioner. Although the basic lumped parameter model may be used to describe physical events in NEMS/MEMS, it cannot be used to simulate their behavior correctly (Kolahi et al, 2021; Salarieh and Karami, 2014). Consideration of electrode deformation can increase the accuracy of the generated model and, as a result, the controller’s performance.…”

Section: Introductionmentioning

confidence: 99%

“…Consideration of electrode deformation can increase the accuracy of the generated model and, as a result, the controller's performance. A feedback controller for tracking the electrostatically actuated micro-beams is suggested by Salarieh and Karami (2014). A fuzzy backstepping controller for microplate stabilization is developed (Tooranjipour et al, 2020).…”

Section: Introductionmentioning

confidence: 99%

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An improved fuzzy controller on electromechanical nano-tweezers

Koochi

Goharimanesh

Gharib

2022

Journal of Vibration and Control

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This paper aims to develop an improved fuzzy controller for position controlling of nano-wire-based electromechanical nano-tweezers. The nonlinear governing equation is developed by incorporating the Euler–Bernoulli beam model and Hamilton’s principle. Also, the quantum vacuum fluctuations are assimilated in the developed model in terms of Casimir attraction. The nonlinear constitutive equation is transformed into a nonlinear state-space form by employing the Galerkin method. Based on the linguistic explanation of the system, an improved fuzzy controller is designed to control the nano-tweezers for manipulating desired objects. The Taguchi technique has been used to decrease the number of independent experiments and improve the structure of membership functions, consequently. The designed controller is employed for both controlling and path tracking of nano-tweezers. The outcomes indicate that the proposed improved fuzzy controller has excellent performance for stabilizing the nano-tweezers at any desired gap.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%