Tracking control of piezoelectric actuators

Jung, Hewon; Shim, Jong Youp; Gweon, Dae−Gab

doi:10.1088/0957-4484/12/1/304

Cited by 63 publications

(35 citation statements)

References 12 publications

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“…Research work continues to model the dynamics of PTSs [6,7]. Also, the use of feedback control techniques other than PI controllers to improve the tracking accuracy and scanning speed of AFMs has been undertaken by a number of researchers [4,[8][9][10]. In reference [8], a model predictive control (MPC) technique is presented, which achieves a significant improvement in the tracking of the reference signal.…”

Section: Fig 191 Schematic View Of An Afmmentioning

confidence: 99%

Advanced Control of Atomic Force Microscope for Faster Image Scanning

Rana

Pota

Petersen

2013

Applied Methods and Techniques for Mechatronic Systems

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In atomic force microscopy (AFM), the dynamics and nonlinearities of its nanopositioning stage are major sources of image distortion, especially when imaging at high scanning speed. This chapter discusses the design and experimental implementation of an observer-based model predictive control (OMPC) scheme which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibration in piezoactuators in order to improve the nanopositioning of an AFM. The controller design is based on an identified model of the piezoelectric tube scanner (PTS) for which the control scheme achieves significant compensation of its creep, hysteresis, cross-coupling, and vibration effects and ensures better tracking of the reference signal. A Kalman filter is used to obtain full-state information about the plant. The experimental results illustrate the use of this proposed control scheme.

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Section: Fig 191 Schematic View Of An Afmmentioning

confidence: 99%

Advanced Control of Atomic Force Microscope for Faster Image Scanning

Rana

Pota

Petersen

2013

Applied Methods and Techniques for Mechatronic Systems

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“…As piezoelectric actuators always show some hysteresis and contain nonlinearities, as shown in Figure 2, AFM topographic signals contain both the topographic information of the samples and the erroneous nonlinearity of the z-piezoelectric actuator. [3][4][5][6][7][8][9] A strain gauge sensor can be glued to the z-piezoelectric actuator (P-885.50; PI Corporation) to obtain only the topographic information of the sample, which corresponds to the actual movement of the z-scanner. However, the noise of the sensor is about 1 nm, which is large compared to the noise of an optical lever (usually less than 0.01 nm).…”

Section: Vertical Nonlinearity Correction Of a Tip-scanning Afmmentioning

confidence: 99%

Accurate measurement of the out-of-plane motion of a tip-scanning atomic force microscope

Lee

Gweon

2009

Int. J. Precis. Eng. Manuf.

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A tip-scanning atomic force microscope (AFM) can be used as a highly accurate height-measuring instrument for large samples, such as liquid crystal displays. To accurately measure the flatness or surface roughness of large samples, the xy-scanner-induced out-of-plane motion must be known to discriminate scanner artifacts from the measured AFM images. As the topographic signals of AFM measurements contain the hysteresis of the z-scanner piezoelectric actuators, actual movements of the z-scanner were measured using a z-axis sensor glued to the actuator. The actual out-of-plane motion of the xy-scanner was found to be less than 1 nm for a 50-μm scan.

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“…To model hysteresis and alleviate the problems introduced due to it, many computationally intensive approaches have been formulated [19], [20]. Simple tracking controllers such as an integrator can result in eliminating errors due to hysteresis and creep [21].…”

Section: Introductionmentioning

confidence: 99%

Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms

Aphale

Bhikkaji

Moheimani

2008

IEEE Trans. Nanotechnology

140

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Abstract-Piezoelectricstack-actuated parallel-kinematic nanopositioning platforms are widely used in nanopositioning applications. These platforms have a dominant first resonant mode at relatively low frequencies, typically in the hundreds of hertz. Furthermore, piezoelectric stacks used for actuation have inherent nonlinearities such as hysteresis and creep. These problems result in a typically low-grade positioning performance. Closed-loop control algorithms have shown the potential to eliminate these problems and achieve robust, repeatable nanopositioning. Using closed-loop noise profile as a performance criterion, three commonly used damping controllers, positive position feedback, polynomial-based pole placement, and resonant control are compared for their suitability in nanopositioning applications. The polynomial-based pole placement controller is chosen as the most suitable of the three. Consequently, the polynomial-based control design to damp the resonant mode of the platform is combined with an integrator to produce raster scans of large areas. A scanning resolution of approximately 8 nm, over a 100 m 100 m area is achieved.

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Tracking control of piezoelectric actuators

Cited by 63 publications

References 12 publications

Advanced Control of Atomic Force Microscope for Faster Image Scanning

Advanced Control of Atomic Force Microscope for Faster Image Scanning

Accurate measurement of the out-of-plane motion of a tip-scanning atomic force microscope

Minimizing Scanning Errors in Piezoelectric Stack-Actuated Nanopositioning Platforms

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