Tracking of objects in motion-distorted scanning electron microscope images

Abstract

Microrobotics is a field of high interest in the recent past. Commonly used imaging modalities in this field include optical microscopes and scanning electron microscopes (SEM). Due to the scanning principle of the SEMs, objects in motion may not be represented in the SEM images the same way as they really are. Movement leads to movement artifacts. This effect strongly limits the possibilities for the use of image based methods for tracking and recognition and it also limits the possible speeds achievable for automated procedures. In this work, a tracking algorithm is proposed which is robust to artifacts and distortions generated by object motion. The algorithm is tested and validated in experiments.

H<inf>&#x221E;</inf>-based position control of a 2DOF piezocantilever using magnetic sensors

“…If very high resolution is mandatory, interferometers have to be implemented [21], [22]. In vacuum environnement, electronic vision based on a Scanning Electron Microscope (SEM) is also a way to estimate displacements for nanorobotics tasks [23], [24]. The main drawback of external sensors is the size, which is significantly big compared with the micro-actuator, this fact prevents the implementation/design of compact and/or embedded control systems.…”