Trajectory split method for Monte Carlo simulation of ion implantation

Bohmayr, W.; Burenkov, A.; Lorenz, J.; Ryssel, H.; Selberherr, S.

doi:10.1109/66.475181

Cited by 33 publications

(13 citation statements)

References 8 publications

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“…This is the most widely used conventional method. Another one is "concentration-based method" and it splits trajectories based on gradient of concentration [3][4][5]. In this study, a commercial MC ion implantation simulator [9] was used for conventional depthbased method.…”

Section: Simulation Methodsmentioning

confidence: 99%

“…Trajectory splitting method has been widely used to enhance statistical performance [3][4][5][6][7][8]. Basic idea of trajectory splitting method is to increase local number of ion trajectories in areas with large statistical noise.…”

Section: Simulation Methodsmentioning

confidence: 99%

“…Several statistical enhancement methods were proposed in literature [3][4][5][6][7][8], however the methodologies were focused on reduction of noise in the tail regions of 1D or 2D concentration profiles and have not been applied to complex 3D structures and so their effectiveness has not been confirmed. This study is the first one to apply concentration-based statistical enhancement method to complex 3D structure.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Efficient Monte Carlo simulation of ion implantation into 3D FinFET structure

Kubotera

Kayama

Nagura

et al. 2014

2014 20th International Conference on Ion Implantation Technology (IIT)

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Precise simulation of ion implantation is a crucial base point of Front End Process (FEP) TCAD. To meet both simulation accuracy target and achieve short turnaround time (TAT), an improved statistical enhancement method has been implemented in Monte Carlo ion implantation simulator. The approach used for statistical enhancement allowed lower lateral doping profile noise comparing to conventional method while using just a fraction of simulation time. The results led to significant TAT reduction for advanced Logic and Memory FEP simulations.

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Section: Simulation Methodsmentioning

confidence: 99%

Section: Simulation Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Efficient Monte Carlo simulation of ion implantation into 3D FinFET structure

Kubotera

Kayama

Nagura

et al. 2014

2014 20th International Conference on Ion Implantation Technology (IIT)

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“…In the third experiment we used SCALA to analyze the performance of a Monte Carlo ionimplantation simulator for three-dimensional crystalline structures [12,13] as developed by Selberherr and colleagues at the Vienna University of Technology. The ion-implantation simulator is a heterogeneous code which comprises both Fortran and C code segments.…”

Section: Methodsmentioning

confidence: 99%

“…Simulations extend to several days and even weeks for realistic problem sizes, which makes it a first-order target for parallelization. Because the serial code for the ion-implantation simulator already existed, we followed a parallelization strategy that modified the original code and computation models [12,13,34] as little as possible, by isolating communication and synchronization in a few routines.…”

Section: Ion-implantation Simulator For Three-dimensional Crystallinementioning

confidence: 99%

Development and performance analysis of real‐world applications for distributed and parallel architectures

Fahringer

Blaha

Hössinger

et al. 2001

Concurrency and Computation

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SUMMARYSeveral large real-world applications have been developed for distributed and parallel architectures. We examine two different program development approaches. First, the usage of a high-level programming paradigm which reduces the time to create a parallel program dramatically but sometimes at the cost of a reduced performance; a source-to-source compiler, has been employed to automatically compile programs-written in a high-level programming paradigm-into message passing codes. Second, a manual program development by using a low-level programming paradigm-such as message passing-enables the programmer to fully exploit a given architecture at the cost of a time-consuming and error-prone effort. Performance tools play a central role in supporting the performance-oriented development of applications for distributed and parallel architectures. SCALA-a portable instrumentation, measurement, and post-execution performance analysis system for distributed and parallel programs-has been used to analyze and to guide the application development, by selectively instrumenting and measuring the code versions, by comparing performance information of several program executions, by computing a variety of important performance metrics, by detecting performance bottlenecks, and by relating performance information back to the input program. We show several experiments of SCALA when applied to realworld applications. These experiments are conducted for a NEC Cenju-4 distributed-memory machine and a cluster of heterogeneous workstations and networks.

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Monte Carlo Analysis

Lugli

1999

Wiley Encyclopedia of Electrical and Electronics Engineering

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Trajectory split method for Monte Carlo simulation of ion implantation

Cited by 33 publications

References 8 publications

Efficient Monte Carlo simulation of ion implantation into 3D FinFET structure

Efficient Monte Carlo simulation of ion implantation into 3D FinFET structure

Development and performance analysis of real‐world applications for distributed and parallel architectures

Monte Carlo Analysis

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