Transforming an Optical Pick-Up-Head Into an Accelerometer With UltraHigh Sensitivity

Hung, Shih‐Chang; Cheng, Chung-Wei; Chiang, Meng‐Tsan; Chieh, Jih-Wei

doi:10.1109/tim.2013.2282427

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2022

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Cited by 2 publications

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“…Atomic force microscopes [ 5 , 6 ] and CD/DVD pickup heads [ 7 , 8 ] utilize quadrant photodetectors (QPD) [ 9 , 10 ] to achieve 2D angular-displacement sensing with ultra-high resolution, but their measuring ranges are limited. Micro-opto-electromechanical systems (MOEMS) [ 11 ] benefit from the development of semiconductor integrated circuits and microelectromechanical systems (MEMS) [ 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer

Hung

Chung

Chen

et al. 2022

Sensors

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The mirror galvanometer is a crucial component of laser cutters/engravers. Novel two-dimensional mirror galvanometers demonstrate less trajectory distortion than traditional one-dimensional ones. This article proposes an optoelectronic sensor that measures a mirror’s inclinations in two dimensions simultaneously. The measuring range, resolution, and sampling rate are ±10°, 0.0265°, and 2 kHz, respectively. With the proposed sensor, a closed-loop control can be further implemented to achieve precision laser machining. Its compact size and low cost meet the requirements of miniature laser engravers, which have become popular in recent years.

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