2002
DOI: 10.1116/1.1464837
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Transience of plasma surface modification as an adhesion promoter for polychlorotrifluorethylene

Abstract: Articles you may be interested inPoly͑chlorotrifluoroethylene͒ ͑PCTFE͒ and other fluoropolymers are increasingly used as inner layer dielectrics. However, these polymers have low surface energies and correspondingly poor adhesive properties. Results are presented on the use of a low-pressure ammonia plasma to enhance the surface bondability of PCTFE. The plasma modified PCTFE film surfaces were characterized by x-ray photoelectron spectroscopy and contact angle measurements. Surface modified films exhibited im… Show more

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Cited by 4 publications
(2 citation statements)
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“…5 shows a comparison of the binding energy of C 1s between the untreated F 2311 surface and the plasma-treated surface. The small peak on the low binding energy side of the observed surface decreased, showing a decreased proportion of CH 2 in comparison [4,6,20] . The additional peak C4 at 289.3 to 289.8 was possibly due to CHF−CHF−CHF, CF 2 −CHF−CF 2 and O-C=O groups [4,21] .…”
Section: Chemical Composition Of Air Dbd Plasma Treated F 2311 Surfacesmentioning
confidence: 92%
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“…5 shows a comparison of the binding energy of C 1s between the untreated F 2311 surface and the plasma-treated surface. The small peak on the low binding energy side of the observed surface decreased, showing a decreased proportion of CH 2 in comparison [4,6,20] . The additional peak C4 at 289.3 to 289.8 was possibly due to CHF−CHF−CHF, CF 2 −CHF−CF 2 and O-C=O groups [4,21] .…”
Section: Chemical Composition Of Air Dbd Plasma Treated F 2311 Surfacesmentioning
confidence: 92%
“…After plasma treatment, the observed C 1s spectra could not be fitted well unless an additional peak was introduced. The component C1 at 286.1 eV to 286.6, eV was assigned to -CH 2 -CF 2 −, CHF−CH 2 −CHF and O-CH 2 group; the component C 2 at 290.4 eV to 291 eV was assigned to CF2-CFCl−CF 2 and CFH−CFCl−CFH groups; the component C3 at 291.9 to 292.3 eV was assigned to CH 2 -CF 2 −CFCl, respectively[4,6,20] . The additional peak C4 at 289.3 to 289.8 was possibly due to CHF−CHF−CHF, CF 2 −CHF−CF 2 and O-C=O groups[4,21] .…”
mentioning
confidence: 99%